Abstract-The advances in silicon photonics related device development have been evolved into standard complementary metal-oxide-semiconductor (CMOS) technology in recent years. The emission of visible light (400-900 nm) by a monolithically integrated silicon p-n junction under reverse bias presents the silicon light-emitting device (Si-LED). As an integrated optical source, it is then developed for coupling light into the optic waveguide. Through the Monte Carlo and Rsoft BeamPROP simulations, the vertical emission, focusing, refraction, splitting and wave-guiding are also optimized using the same CMOS technology. Since the Si-LED, the SiO 2 -waveguide, and the Si-photodetector can be monolithically integrated on the same bulk-Si substrate, a concise micro-opto-electro-mechanical systems (MOEMS) could be realized in the modern CMOS structural & integrated circuitry standard platform.