1971
DOI: 10.1147/rd.156.0457
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An Arsenic Emitter Structure for High-Performance Silicon Transistors

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1973
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Cited by 9 publications
(6 citation statements)
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“…[1], ps is the sheet resistivity, q is the electron charge, and ~x is the electron mobility at the depth x. The computer program simply performs the calculation d (ps-D --N~ ~x q [i1 dx to find the concentration Nz at the depth x.…”
Section: Methodsmentioning
confidence: 99%
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“…[1], ps is the sheet resistivity, q is the electron charge, and ~x is the electron mobility at the depth x. The computer program simply performs the calculation d (ps-D --N~ ~x q [i1 dx to find the concentration Nz at the depth x.…”
Section: Methodsmentioning
confidence: 99%
“…In Eq. [1], ps is the sheet resistivity, q is the electron charge, and ~x is the electron mobility at the depth x. The mobility values used were from the compilation by Irvin (4).…”
Section: Methodsmentioning
confidence: 99%
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