An analysis of stepped trapezoidal-shaped microcantilever beams for MEMS-based devices

Abstract

Microcantilever beams are the most widely used mechanical elements in the design and fabrication of MEMS/NEMS-based sensors and actuators. In this work, we have proposed a new microcantilever beam design based on a stepped trapezoidal-shaped microcantilever. Single-, double-, triple- and quadruple-stepped trapezoidal-shaped microcantilever beams along with conventional rectangular-shaped microcantilever beams were analysed experimentally, numerically and analytically. The microcantilever beams were fabricated from silicon dioxide material using wet bulk micromachining in 25 wt% TMAH. The length, width and thickness of the microcantilever beams were fixed at 200, 40 and 0.96 µm, respectively. A laser vibrometer was utilized to measure the resonance frequency and Q-factor of the microcantilever beams in vacuum as well as in ambient conditions. Furthermore, finite element analysis software, ANSYS, was employed to numerically analyse the resonance frequency, maximum deflection and torsional end rotation of all the microcantilever beam designs. The analytical and numerical resonance frequencies are found to be in good agreement with the experimental resonance frequencies. In the stepped trapezoidal-shaped microcantilever beams with an increasing number of steps, the Q-factor, maximum deflection and torsional end rotation were improved, whereas the resonance frequency was slightly reduced. Nevertheless, the resonance frequency is higher than the basic rectangular-shaped microcantilever beam. The observed quality factor, maximum deflection and torsional end rotation for a quadruple-stepped trapezoidal-shaped microcantilever are 38%, 41% and 52%, respectively, which are higher than those of conventional rectangular-shaped microcantilever beams. Furthermore, for an applied concentrated mass of 1 picogram on the cantilever surface, a greater shift in frequency is obtained for all the stepped trapezoidal-shaped microcantilever beam designs compared to the conventional rectangular microcantilever beam.

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