An alternative solution to improve sensitivity of resonant microcantilever chemical sensors: comparison between using high-order modes and reducing dimensions

Lochon, Frédéric; Dufour, Isabelle; Rebière, Dominique

doi:10.1016/j.snb.2004.11.086

Cited by 99 publications

(59 citation statements)

References 10 publications

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“…4. According to (15), the sensitivity may be improved by increasing the thickness of the polymeric sensitive coating, provided that [1]. This analytical expression of the sensitivity has been verified experimentally in [7] and [22], which validate the fact that the mass effect is predominant and that the mass increase of the coating is small compared with the coating mass.…”

Section: A Sensor Sensitivitymentioning

confidence: 62%

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Effect of Coating Viscoelasticity on Quality Factor and Limit of Detection of Microcantilever Chemical Sensors

et al. 2007

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Abstract-Microcantilevers with polymer coatings hold great promise as resonant chemical sensors. It is known that the sensitivity of the coated cantilever increases with coating thickness; however, increasing this thickness also results in an increase of the frequency noise due to a decrease of the quality factor. By taking into account only the losses associated with the silicon beam and the surrounding medium, the decrease of the quality factor cannot be explained. In this paper, an analytical expression is obtained for the quality factor, which accounts for viscoelastic losses in the coating. This expression explains the observed decrease of the quality factor with increasing polymer thickness. This result is then used to demonstrate that an optimum coating thickness exists that will maximize the signal-to-noise ratio and, thus, minimize the sensor limit of detection.

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Section: A Sensor Sensitivitymentioning

confidence: 62%

“…1). The absorbed molecules can then be detected by monitoring the shift in the mechanical resonant frequency [1]- [9].…”

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confidence: 99%

Effect of Coating Viscoelasticity on Quality Factor and Limit of Detection of Microcantilever Chemical Sensors

et al. 2007

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“…Microcantilevers can be made stiffer by shortening their length. 33,34 The resonant frequency of a microcantilever operating in a fluid is roughly proportional to the inverse of its length squared. Thus, decreasing the length by 10% would increase the resonant frequency by $ 23%.…”

Section: Introductionmentioning

confidence: 99%

“…The deposition reproducibility of this sensing layer will also be less accurate for shorter beams. 33 Microcantilevers can also operate in higher-order flexural modes. [35][36][37] Higher-order modes have flexural mode shapes that have one or more points along the length of the microcantilever (besides the clamped end) that do not deflect as a function of time.…”

Section: Introductionmentioning

confidence: 99%

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Characteristics of laterally vibrating resonant microcantilevers in viscous liquid media

Cox

Josse

Heinrich

et al. 2012

Journal of Applied Physics

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The characteristics of microcantilevers vibrating laterally in viscous liquid media are investigated and compared to those of similar microcantilevers vibrating in the out-of-plane direction. The hydrodynamic loading on the vibrating beam is first determined using a numerical model. A semi-analytical expression for the hydrodynamic forces in terms of the Reynolds number and the aspect ratio (beam thickness over beam width) is obtained by introducing a correction factor to Stokes' solution for a vibrating plate of infinite area to account for the effects of the thickness. The results enable the effects of fluid damping and effective fluid mass on the resonant frequency and the quality factor (Q) to be investigated as a function of both the beam's geometry and liquid medium's properties and compared to experimentally determined values given in the literature. The resonant frequency and Q are found to be higher for laterally vibrating microcantilevers compared to those of similar geometry experiencing transverse (out-of-plane) vibration. Compared to transversely vibrating beams, the resonant frequency of laterally vibrating beams is shown to decrease at a slower rate (with respect to changes in viscosity) in media having higher viscosities than water. The theoretical results are compared to experimental data obtained for cantilevers completely immersed in solutions of varying aqueous percent glycerol. The increases in resonant frequency and Q are expected to yield much lower limits of detection in liquid-phase chemical sensing applications.

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Cantilever Array Sensors for Bioanalysis and Diagnostics

Lang

Hegner

Gerber

2007

Nanobiotechnology II

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An alternative solution to improve sensitivity of resonant microcantilever chemical sensors: comparison between using high-order modes and reducing dimensions

Cited by 99 publications

References 10 publications

Effect of Coating Viscoelasticity on Quality Factor and Limit of Detection of Microcantilever Chemical Sensors

Effect of Coating Viscoelasticity on Quality Factor and Limit of Detection of Microcantilever Chemical Sensors

Characteristics of laterally vibrating resonant microcantilevers in viscous liquid media

Cantilever Array Sensors for Bioanalysis and Diagnostics

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