An All-Metal Micro-Relay With Bulk Foil Pt–Rh Contacts for High-Power RF Applications

Ozkeskin, F. M.; Choi, Sangjo; Sarabandi, Kamal; Gianchandani, Yogesh B.

doi:10.1109/tmtt.2012.2192744

Cited by 7 publications

(4 citation statements)

References 27 publications

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“…The usefulness of Si in this role was anticipated in a patent [27], for which preliminary results were obtained using wet-etched Si. This paper reports the first results obtained with high-aspect-ratio Si cutting tools 4 Portions of this paper appear in conference abstract form in [26]. that are fabricated by deep reactive ion etching (DRIE).…”

Section: Introductionmentioning

confidence: 99%

“…Stainless steel and other metal alloys are attractive as structural and packaging materials in microsystems because of superior mechanical strength, chemical resistance and other desirable properties. For example, stainless steel has been used for smart stents [1], micro-packages for implantable devices [2], microfluidic devices for gas chromatography [3], high power micro-relays [4] and pressure sensors for oil-exploration [5]. Alloys of titanium have been used for packaging micromachined sensors for harsh environments [6,7], and for in vivo applications [8].…”

Section: Introductionmentioning

confidence: 99%

“…This paper reports the use of silicon as a cutting tool in batch mode μEDM 4 . The usefulness of Si in this role was anticipated in a patent [27], for which preliminary results were obtained using wet-etched Si.…”

Section: Introductionmentioning

confidence: 99%

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High precision batch mode micro-electro-discharge machining of metal alloys using DRIE silicon as a cutting tool

Bai

Gianchandani

2013

J. Micromech. Microeng.

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This paper reports recent advances in batch mode micro-electro-discharge machining (μEDM) for high precision micromachining of metal alloys such as stainless steel. High-aspect-ratio silicon microstructures with fine feature sizes formed by deep reactive ion etching are used as cutting tools. To machine workpiece features with widths 10 μm, a silicon dioxide coating is necessary to passivate the sidewalls of the silicon tools from spurious discharges. In the machined workpieces, a minimum feature size of ≈7 μm and an aspect ratio up to 3.2 are demonstrated by the batch mode μEDM of stainless steel 304 and titanium (Grade 1) substrates. Machining rates up to ≈5 μm min −1 in feature depth are achieved in batch mode micromachining of typical microfluidic structures, including arrays of channels and cavities of different sizes. The machined features are uniform across a die-scale area of 5 × 5 mm 2. Other machining characteristics are also discussed.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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High precision batch mode micro-electro-discharge machining of metal alloys using DRIE silicon as a cutting tool

Bai

Gianchandani

2013

J. Micromech. Microeng.

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“…To date electrostatic actuators are mostly used as micro actuators such as micromirrors [1], [2], microgrippers [3], microrelays [4], micromanipulators [5], micromechanical probes [6], and optical modulators [7]. Electrostatic actuators also have potential to work as macro actuators such as artificial muscles of robots theoretically.…”

Section: Introductionmentioning

confidence: 99%

Study of the contraction characteristics of a large-scale stacked-type electrostatic actuator

Ito

Saneyoshi

2013

IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society

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Electrostatic actuators have some advantages such as the light weight and the high energy efficiency, and these characteristics are suitable for use as artificial muscles. Traditional electrostatic actuators, however, cannot have long strokes and large force at the same time because the electrode intervals widen beyond necessity. This paper presents a large-scale stackedtype electrostatic actuator (LSEA) which was developed for use as artificial muscles of robots and power assist suits. LSEA is a multiply-stacked electrostatic actuator, and can contract linearly by the application of a voltage. It has a unique structure which can prevent the electrode intervals from overextending. It is therefore possible to have long stroke and large force at the same time. In experiments, the contraction characteristics as a function of applied voltage, load weight and elapsed time was measured. The measurements revealed LSEA achieved the contraction ratio equivalent to that of a muscle and also can have a high actuation energy density.

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Electrostatically actuated MEMS relay arrays for high-power applications

You

Ruan

et al. 2015

Microsyst Technol

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An All-Metal Micro-Relay With Bulk Foil Pt–Rh Contacts for High-Power RF Applications

Cited by 7 publications

References 27 publications

High precision batch mode micro-electro-discharge machining of metal alloys using DRIE silicon as a cutting tool

High precision batch mode micro-electro-discharge machining of metal alloys using DRIE silicon as a cutting tool

Study of the contraction characteristics of a large-scale stacked-type electrostatic actuator

Electrostatically actuated MEMS relay arrays for high-power applications

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