An 11.6aF/kPa Mechanical Stress Sensor With 0.808% Temperature-Drift Oscillator for Flip-Chip Packaging

Xiao, Lanxiang; Chen, Lei; An, Fengwei

doi:10.1109/tcsii.2022.3176278

Cited by 1 publication

(2 citation statements)

References 22 publications

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“…represents the ratio of the reference electrostatic force to the reference force, in which J is the mechanical tension of d-microplate (Pelesko, 2002;Tilli et al, 2020;Xiao et al, 2022;Yang et al, 2021). Remark 1 Finally, p, locally, provides the influence of the material's permittivity on the device's electromechanical behavior.…”

Section: Galerkin-fem Approachmentioning

confidence: 99%

“…, 2005): and, if γ is a positive dimensionless parameter linked to the stretching effects in the d-microplate, relation (6) can be written as: or, alternatively: in which p is a positive function describing the local dielectric properties of d-microplate (silicon or polysilicon) and: represents the ratio of the reference electrostatic force to the reference force, in which J is the mechanical tension of d-microplate (Pelesko, 2002; Tilli et al. , 2020; Xiao et al. , 2022; Yang et al.…”

Section: The Dynamic Continuous Modelmentioning

confidence: 99%

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Galerkin-FEM approach for dynamic recovering of the plate profile in electrostatic MEMS with fringing field

Versaci,

Angiulli,

Fattorusso

et al. 2024

COMPEL

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Purpose Based on previous results of the existence, uniqueness, and regularity conditions for a continuous dynamic model for a parallel-plate electrostatic micro-electron-mechanical-systems with the fringing field, the purpose of this paper concerns a Galerkin-FEM procedure for deformable element deflection recovery. The deflection profiles are reconstructed by assigning the dielectric properties of the moving element. Furthermore, the device’s use conditions and the deformable element’s mechanical stresses are presented and discussed. Design/methodology/approach The Galerkin-FEM approach is based on weighted residuals, where the integrals appearing in the solution equation have been solved using the Crank–Nicolson algorithm. Findings Based on the connection between the fringing field and the electrostatic force, the proposed approach reconstructs the deflection of the deformable element, satisfying the conditions of existence, uniqueness and regularity. The influence of the electromechanical properties of the deformable plate on the method has also been considered and evaluated. Research limitations/implications The developed analytical model focused on a rectangular geometry. Practical implications The device studied is suitable for industrial and biomedical applications. Originality/value This paper proposed numerical approach characterized by low CPU time enables the creation of virtual prototypes that can be analyzed with significant cost reduction and increased productivity.

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Section: Galerkin-fem Approachmentioning

confidence: 99%