“…Six elementary native point defect species exist in GaAs: vacancies in the Ga sublattice (V Ga ), vacancies in the As sublattice (V As ), Ga self-interstitials, As selfinterstitials, and antisite defects formed by a Ga atom on an As site (Ga As ) or an As atom on Ga site (As Ga ). 19 Amongst the six intrinsic defects of GaAs, only V Ga and Ga As are acceptors. 20 For Si doped GaAs, it has been found that Si can behave as donor Si Ga , an acceptor Si As and form Si pairs, clusters and complexes of Si atoms with native defects 12 , which together can be responsible for self compensation mechanisms and creation of energy levels in the forbidden energy gap.…”