Amorphous silicon carbonitride diaphragm for environmental-cell transmission electron microscope fabricated by low-energy ion beam induced chemical vapor deposition

Matsutani, Takaomi; Yamasaki, Kayo; Imaeda, Norihiro; Kawasaki, Tadahiro

doi:10.1016/j.nimb.2015.08.011

Nuclear Instruments and Methods in Physics Research Section B:

2015

DOI: 10.1016/j.nimb.2015.08.011

|View full text |Cite

Amorphous silicon carbonitride diaphragm for environmental-cell transmission electron microscope fabricated by low-energy ion beam induced chemical vapor deposition

Takaomi Matsutani

Kayo Yamasaki

Norihiro Imaeda

et al.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2018

2022

Publication Types

Select...

Article4

Relationship

Self Cite0

Independent4

Authors

Journals

Cited by 4 publications

References 15 publications

(17 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

Organosilicon compounds as single-source precursors for SiCN films production

Ermakova

Косинова

2022

Journal of Organometallic Chemistry

View full text Add to dashboard Cite

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

hi@scite.ai

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Amorphous silicon carbonitride diaphragm for environmental-cell transmission electron microscope fabricated by low-energy ion beam induced chemical vapor deposition

Cited by 4 publications

References 15 publications

Organosilicon compounds as single-source precursors for SiCN films production

Organosilicon compounds as single-source precursors for SiCN films production

Surface modification of triacetylcellulose by low-energy nitrogen ions for diaphragm of environmental cell transmission electron microscope

Reprint of "Surface modification of triacetylcellulose by low-energy nitrogen ions for diaphragm of environmental cell transmission electron microscope"

Contact Info

Product

Resources

About