Superlattices of a-SiO x /nc-CdSe and thin composite films of SiO x doped with CdSe nanocrystals have been investigated. The CdSe nanocrystals size in both kinds of samples was determined by x-ray diffraction and HREM measurements. A significant difference has been found in the size values determined by both methods, which has been ascribed to appreciable nanocrystal lattice deformations. Subband absorption, room-temperature photoluminescence and thermally stimulated currents have been measured. It has been observed that in the superlattices the absorption in the tail region increases as sublayer thickness decreases. A new photoluminescence band has also appeared in the superlattices having thinnest (2.5 nm) CdSe sublayers. Two new maximums at about 220 K and 240 K, not existing in the CdSe single layers studied, have been found in thermally stimulated current spectra of the composite films. Both maximums are less expressed in the superlattices. The described results have been connected with a size-induced increase in the concentration of interface defect states in CdSe nanocrystals. It has been estimated that these defects are disposed at about 0.35 eV above the highest occupied molecular orbit in CdSe.