Aluminum Films Deposition Using a UHV Sputtering System with an Ultimate Pressure of the Order of 10-8 Pa.

Toyoda, Satoru; Kiyota, Tetsuji; Tamagawa, Kouichi; Yamakawa, Hiroyuki

doi:10.3131/jvsj.35.180

SHINKU

1992

DOI: 10.3131/jvsj.35.180

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Aluminum Films Deposition Using a UHV Sputtering System with an Ultimate Pressure of the Order of 10-8 Pa.

Satoru Toyoda

Tetsuji Kiyota

Kouichi Tamagawa

et al.

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Aluminum Films Deposition Using a UHV Sputtering System with an Ultimate Pressure of the Order of 10-8 Pa.

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