Aluminum-doped zinc oxide film with gradient property deposited at oblique angle

Cao, Sen; Ye, Fei; Hou, Bo; Xu, A. Y.

doi:10.1016/j.tsf.2013.08.003

Cited by 10 publications

(8 citation statements)

References 23 publications

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“…Al-doped zinc oxide (AZO) thin films prepared by either e-beam or MS OAD [323,[340][341][342][343][344] have been successfully used in solar cells and LED devices. The synthesis of Sb-doped tin oxide (STO) and Nb-doped titanium oxide (TNO) films with a strictly controlled composition, microstructure and porosity has also been recently reported to achieve outstanding optical transparency and electrical conductivity [323,345,346].…”

Section: Alternative Tco Films Prepared Under Oad Conditionsmentioning

confidence: 99%

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Barranco

Borrás

González‐Elipe

et al. 2016

Progress in Materials Science

601

436

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a b s t r a c tThe oblique angle configuration has emerged as an invaluable tool for the deposition of nanostructured thin films. This review develops an up to date description of its principles, including the atomistic mechanisms governing film growth and nanostructuration possibilities, as well as a comprehensive description of the applications benefiting from its incorporation in actual devices. In contrast with other reviews on the subject, the electron beam assisted evaporation technique is analyzed along with other methods operating at oblique angles, including, among others, magnetron sputtering and pulsed laser or ion beam-assisted deposition techniques. To account for the existing differences between deposition in vacuum or in the presence of a plasma, mechanistic simulations are critically revised, discussing well-established paradigms such as the tangent or cosine rules, and proposing new models that explain the growth of tilted porous nanostructures. In the second part, we present an extensive description of applications wherein oblique-angle-deposited thin films are of relevance. From there, we proceed by considering the requirements of a large number of functional devices in which these films are currently being utilized (e.g., solar cells, Li batteries, electrochromic glasses, biomaterials, sensors, etc.), and subsequently describe how and why these nanostructured materials meet with these needs.

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Section: Alternative Tco Films Prepared Under Oad Conditionsmentioning

confidence: 99%

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Barranco

Borrás

González‐Elipe

et al. 2016

Progress in Materials Science

601

436

View full text Add to dashboard Cite

show abstract

“…On the other hand, well-separated nanostructures can result in light scattering in the nanostructure layer and trap the light; thus they can introduce a light trapping property and increase light absorption. The increase in porosity of AZO nanostructures has already been reported to result in a decrease in the transmission with an increase of the GLAD angle from 0 to 45 in another study [28]. A further increase resulted in an increase in transmittance with porosity [28].…”

Section: Estimation Of Grain Sizes and Strainsmentioning

confidence: 73%

“…The increase in porosity of AZO nanostructures has already been reported to result in a decrease in the transmission with an increase of the GLAD angle from 0 to 45 in another study [28]. A further increase resulted in an increase in transmittance with porosity [28]. On the other hand, improving crystal quality with increasing grain size and decreasing strain can enhance the transmittance of ZnO nanostructures [29].…”

Section: Estimation Of Grain Sizes and Strainsmentioning

confidence: 82%

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Glancing angle deposited Al-doped ZnO nanostructures with different structural and optical properties

et al. 2015

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Al-doped ZnO (AZO) nanostructure arrays with different shapes (tilted rods, vertical rods, spirals, and zigzags) were fabricated by utilizing glancing angle deposition (GLAD) technique in a DC sputter growth unit at room temperature. During GLAD, all the samples were tilted at an oblique angle of about 90°with respect to incoming flux direction. In order to vary the shapes of nanostructures, each sample was rotated at different speeds around the substrate normal axis. Rotation speed did not only affect the shape but also changed the microstructural and optical properties of GLAD AZO nanostructures. The experimental results reveal that GLAD AZO nanostructures of different shapes each have unique morphological, crystal structure, mechanical, and optical properties determined by scanning electron microscopy, X-ray diffraction, transmission, and reflectance measurements. Vertical nanorods display the largest grain size, minimum strain, lowest defect density, and highest optical transmittance compared to the other shapes. Growth dynamics of GLAD has been discussed to explain the dependence of structural and optical properties of nanostructures on the substrate rotation speed.

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“…We consider that crystal quality could be used to explain the optical properties for the CdTe samples grown without a GLAD angle, namely, SA-0 and SA-1. A high crystal quality is related to a material with few defects, which in turn could result in a higher value of transmittance [29]. Table 1 showed that SA-1 presented a higher crystallite size than SA-0, meaning that the substrate rotation resulted in an improving of the crystallinity for the deposited CdTe samples.…”

Section: Results and Discusionmentioning

confidence: 99%

CdTe films grown using a rotating sublimate vapor effusion source in glancing angle deposition mode

Daza

Castro-Rodrı́guez

Martín-Tovar

et al. 2017

Materials Science in Semiconductor Processing

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Aluminum-doped zinc oxide film with gradient property deposited at oblique angle

Cited by 10 publications

References 23 publications

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Perspectives on oblique angle deposition of thin films: From fundamentals to devices

Glancing angle deposited Al-doped ZnO nanostructures with different structural and optical properties

CdTe films grown using a rotating sublimate vapor effusion source in glancing angle deposition mode

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