Aluminum-doped zinc oxide electrode for robust (Pb,La)(Zr,Ti)O3 capacitors: effect of oxide insulator encapsulation and oxide buffer layer

Effect of excess Pb on ferroelectric characteristics of conductive Al-doped ZnO and Sn-doped In2O3 top electrodes in PbLaZrTiO x capacitors

“…Similar to our previous studies, the absence of pyrochlore phase in Fig. 1 indicated that the PLZT thin films fabricated by the CSD method had polycrystalline perovskite structure (Takada et al [34]). However, polycrystalline PLZT thin films sometimes include a lot of peaks ascribed to possible pyrochlore phase, e. g. 2h = 31 and 528, we then examined the surface morphologies of the PLZT thin films in order to check for the presence of pyrochlore phase.…”

“…These steps were repeated three times to form a 500-nm-thick PLZT film. After the final calcination, the PLZT film was crystallized by RTA at 750 8C in air for 10 min [30,33,34]. The AZO (ZnO : Al 2 O 3 = 98.5 : 1.5 wt.%) and ITO (In 2 O 3 :SnO 2 = 95.0 : 5.0 wt.%) top electrodes (150-nm-thick) were deposited on the PLZT films using PLD with a 50*500-lm-diameter shadow mask (SUS304) under the conditions listed in Table 1.…”

“…Representative initial P-V hysteresis loops of AZO/ PLZT/Pt capacitors with different Pb contents are shown in Fig. 3a. There have been few reports to date about the ferroelectric properties of PLZT capacitors with AZO top electrodes (Takada et al [33] and [34] Fig. 3d.…”

Ultrathin Ferroelectric Films: Growth, Characterization, Physics and Applications

“…Accompany with the studies on fatigue mechanism, much effort have been done to pursuit fatigue-free devices with ferroelectric thin films, which almost have been achieved by SBT-based capacitors [455,467], PZT or PLZT thin films with oxide electrodes [468,469], Bi 4 Ti 3 O 12 -based films capacitors [470,471], as well as buffer layer or ion doping modified BFO film capacitors [472,473], etc. , generally with fatigue-free behaviors up to 10 10 switching cycles.…”

Fabrication of doped Pb(Zr,Ti)O 3 capacitors on Pt substrates with different orientations

“…A solution was spin-coated onto the Pt substrate to form capacitor structures. Details of the fabrication process have been reported previously [9][10][11].…”