Aluminium and tantalum nitride barriers against copper diffusion in solar absorbers

Kotilainen, Minna; Vuoristo, Petri

doi:10.1080/02670844.2015.1121314

Cited by 13 publications

(4 citation statements)

References 29 publications

(54 reference statements)

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“…The optical images of the bare Cu substrates after heating at 100 • C for 1 h, shown in Figure S1, do not exhibit any changes to film quality. Additionally, it should be noted that Cu was not directly deposited onto Si, but onto an adhesion layer of Al, which has been shown to be effective towards limiting Cu diffusion [60]. The thickness of the Cu film was 400 nm, and even if there was some diffusion of Cu atoms into Si, it is unlikely that this distorted the structure of the SAM, which was not at the Cu/Si interface.…”

Section: Resultsmentioning

confidence: 99%

Stearic Acid as an Atomic Layer Deposition Inhibitor: Spectroscopic Insights from AFM-IR

Satyarthy,

Hasan Ul Iqbal,

Abida

et al. 2023

Nanomaterials

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Modern-day chip manufacturing requires precision in placing chip materials on complex and patterned structures. Area-selective atomic layer deposition (AS-ALD) is a self-aligned manufacturing technique with high precision and control, which offers cost effectiveness compared to the traditional patterning techniques. Self-assembled monolayers (SAMs) have been explored as an avenue for realizing AS-ALD, wherein surface-active sites are modified in a specific pattern via SAMs that are inert to metal deposition, enabling ALD nucleation on the substrate selectively. However, key limitations have limited the potential of AS-ALD as a patterning method. The choice of molecules for ALD blocking SAMs is sparse; furthermore, deficiency in the proper understanding of the SAM chemistry and its changes upon metal layer deposition further adds to the challenges. In this work, we have addressed the above challenges by using nanoscale infrared spectroscopy to investigate the potential of stearic acid (SA) as an ALD inhibiting SAM. We show that SA monolayers on Co and Cu substrates can inhibit ZnO ALD growth on par with other commonly used SAMs, which demonstrates its viability towards AS-ALD. We complement these measurements with AFM-IR, which is a surface-sensitive spatially resolved technique, to obtain spectral insights into the ALD-treated SAMs. The significant insight obtained from AFM-IR is that SA SAMs do not desorb or degrade with ALD, but rather undergo a change in substrate coordination modes, which can affect ALD growth on substrates.

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Section: Resultsmentioning

confidence: 99%

Stearic Acid as an Atomic Layer Deposition Inhibitor: Spectroscopic Insights from AFM-IR

Satyarthy,

Hasan Ul Iqbal,

Abida

et al. 2023

Nanomaterials

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“…There are two possible reasons for the changes: crystallization of the Cu thin film, which leads to changes in the optical properties of the Cu thin film, and or diffusion of the Cu atoms as Cu has a very large diffusion coefficient. 31 The depth profiles of O, Si, Ti, N, and Cu elements in the as-deposited and 400 C-annealed SiO 2 -TiN x O y -Cu-Glass SSA obtained from the XPS analysis are shown in Figures 4(a SSA, and the insets are the corresponding AFM images. The AFM images reveal that there is no significant change in the surface morphologies.…”

Section: Resultsmentioning

confidence: 99%

W/Cu thin film infrared reflector for TiNxOy based selective solar absorber with high thermal stability

Zhang

Chen

Liu

et al. 2017

Journal of Applied Physics

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The W/Cu thin film structure is deposited by magnetron sputtering to form the infrared reflector for the TiN x O y based selective solar absorber (SSA) that can be used in the low-and middletemperature applications. The structural, chemical, and optical properties of the SSA layers that experienced thermal annealing at different temperatures for various durations have been investigated with the characterization techniques, including X-ray photoelectron spectroscopy, X-ray diffraction, atomic force microscopy, spectroscopic ellipsometry, and spectrophotometry. Without a W layer, the reflectance in both visible and infrared ranges of the SSA increases as a result of the crystallization of the Cu layer at elevated temperatures. With a W layer with appropriate film thickness, the increase of the reflectance in the visible range can be suppressed to maintain a high solar absorptance, whereas a high infrared reflectance can be maintained to achieve a low thermal emittance. It is shown that for the SiO 2 -TiN x O y -W-Cu-Glass SSA with a 15 nm W thin film, thermal annealing can significantly reduce the thermal emittance to a low value (e.g., 4.4% at the temperature of 400 C for annealing at 400 C for 6 h), whereas the solar absorptance can be maintained at a high value (e.g., 92.2% for the annealing at 400 C for 6 h).

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“…Due to its better adhesion to substrates, low-temperature deposition and environmental friendliness, the magnetron sputtering technique has become a new technology for the surface functionalisation of the textiles, which can prepare metal films, metal oxide films, ceramic films, polymer films and nanocomposite films [5][6][7][8][9][10][11][12]. Metallic silver has excellent electrical, optical and chemical properties.…”

Section: Introductionmentioning

confidence: 99%

Characterisation of PET nonwoven deposited with Ag/FC nanocomposite films

Yuan

Wei

et al. 2017

Surface Engineering

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Silver/fluorocarbon (Ag/FC) nanocomposite films were successfully deposited on the polyester (PET) nonwoven using magnetron sputtering techniques with pure silver (Ag) and polytetrafluoroethylene (PTFE) targets. FT-IR, XPS, XRD and EDX were used to examine the compositions and structure of Ag and Ag/FC films. SEM and AFM were employed to observe the surface morphology. Hydrophobicity properties and electromagnetic shielding properties of the Ag-and Ag/FC-coated PET nonwoven were also investigated. The experimental results showed that the films deposited on PET nonwoven were even and dense. The Ag existed in the films was elemental silver which had high degree of crystallinity. In contrast, the FC film did not form crystalline structure containing five components, i.e. -CF 3 , -CF 2 -, -CF-, -C-CFand -C-C-, C-F groups clearly observed by the FT-IR spectrum. Compared with the original PET nonwoven, hydrophobicity properties and electromagnetic shielding properties of the PET nonwoven deposited with Ag/FC nanocomposite films were improved significantly.

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Aluminium and tantalum nitride barriers against copper diffusion in solar absorbers

Cited by 13 publications

References 29 publications

Stearic Acid as an Atomic Layer Deposition Inhibitor: Spectroscopic Insights from AFM-IR

Stearic Acid as an Atomic Layer Deposition Inhibitor: Spectroscopic Insights from AFM-IR

W/Cu thin film infrared reflector for TiNxOy based selective solar absorber with high thermal stability

Characterisation of PET nonwoven deposited with Ag/FC nanocomposite films

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