AlScN-based MEMS magnetoelectric sensor

Su, Jingxiang; Niekiel, Florian; Fichtner, Simon; Thormaehlen, Lars; Kirchhof, Christine; Meyners, Dirk; Quandt, Eckhard; Wagner, Bernhard; Lofink, Fabian

doi:10.1063/5.0022636

Cited by 53 publications

(42 citation statements)

References 38 publications

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“…A further improvement by a factor of two could be obtained by exciting both electrodes

and

, phase shifted by 180°. Additionally, alternative piezoelectric materials with larger piezoelectric coefficients, such as AlScN [ 63 , 64 , 65 ] could increase the electrical sensitivity significantly and result in

comparable with bending modes.…”

Section: Resultsmentioning

confidence: 99%

Magnetoelastic Coupling and Delta-E Effect in Magnetoelectric Torsion Mode Resonators

Spetzler

Голубева

Friedrich

et al. 2021

Sensors

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Magnetoelectric resonators have been studied for the detection of small amplitude and low frequency magnetic fields via the delta-E effect, mainly in fundamental bending or bulk resonance modes. Here, we present an experimental and theoretical investigation of magnetoelectric thin-film cantilevers that can be operated in bending modes (BMs) and torsion modes (TMs) as a magnetic field sensor. A magnetoelastic macrospin model is combined with an electromechanical finite element model and a general description of the delta-E effect of all stiffness tensor components Cij is derived. Simulations confirm quantitatively that the delta-E effect of the C66 component has the promising potential of significantly increasing the magnetic sensitivity and the maximum normalized frequency change ∆fr. However, the electrical excitation of TMs remains challenging and is found to significantly diminish the gain in sensitivity. Experiments reveal the dependency of the sensitivity and ∆fr of TMs on the mode number, which differs fundamentally from BMs and is well explained by our model. Because the contribution of C11 to the TMs increases with the mode number, the first-order TM yields the highest magnetic sensitivity. Overall, general insights are gained for the design of high-sensitivity delta-E effect sensors, as well as for frequency tunable devices based on the delta-E effect.

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“…A further improvement by a factor of two could be obtained by exciting both electrodes

and

comparable with bending modes.…”

Section: Resultsmentioning

confidence: 99%

Magnetoelastic Coupling and Delta-E Effect in Magnetoelectric Torsion Mode Resonators

Spetzler

Голубева

Friedrich

et al. 2021

Sensors

Self Cite

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“…Recently, there has been increasing interest in the influence of the quality factor (Q) on the properties of resonator ME sensors [56,[379][380][381][382]. Different techniques were used to enhance the Q and improve the performance of ME sensors.…”

Section: Magnetic Sensorsmentioning

confidence: 99%

“…For the ME sensors operating in resonance, the SNR increases by Q 1/2 [379,383]; for the ΔE operation scheme, an improvement in the SNR proportional to Q 3/2 can be achieved [384]. By using AlScN with a higher ME voltage coefficient instead of AlN in ME sensors, Su et al successfully fabricated devices with higher Q [382]. In conclusion, there are a lot of factors, including materials, pressure, magnetic fields, electric excitation amplitude and so on, that influence the total performance of ME sensors, giving many paths for further study.…”

Section: Magnetic Sensorsmentioning

confidence: 99%

Roadmap on Magnetoelectric Materials and Devices

et al. 2021

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The possibility to tune the magnetic properties of materials with voltage (converse magnetoelectricity) or to generate electric voltage with magnetic fields (direct magnetoelectricity) has opened new avenues in a large variety of technological fields, ranging from information technologies to healthcare devices and including a great number of multifunctional integrated systems such as mechanical antennas, magnetometers, radiofrequency (RF) tunable inductors, etc., which have been realized due to the strong strainmediated magnetoelectric (ME) coupling found in ME composites. The development of singlephase multiferroic materials (which exhibit simultaneous ferroelectric and ferromagnetic or antiferromagnetic orders), multiferroic heterostructures, as well as progress in other ME mechanisms, such as electrostatic surface charging or magneto-ionics (voltage-driven ion migration) have a large potential to boost energy efficiency in spintronics and magnetic actuators. This paper focuses on existing ME materials and devices and reviews the state of the art in their

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“…However, these sensors still have too narrow of a bandwidth for use in DBS applications due to the presence of much higher frequencies (stimulation frequency and harmonics). It is reported that ME sensor approaches offer a high potential for this application since the resonance frequency of an ME sensor can be tuned to the stimulation frequency or its higher harmonics to measure the artificial magnetic signal of DBS [ 24 , 25 , 26 ]. However, such resonant, narrow-band ME sensors measure only a single frequency component of the entire broadband DBS signal, therefore, higher sensor sensitivity is required.…”

Section: Introductionmentioning

confidence: 99%

Investigation of Magnetoelectric Sensor Requirements for Deep Brain Stimulation Electrode Localization and Rotational Orientation Detection

Yalaz

Deuschl

Butz

et al. 2021

Sensors

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Correct position and orientation of a directional deep brain stimulation (DBS) electrode in the patient’s brain must be known to fully exploit its benefit in guiding stimulation programming. Magnetoelectric (ME) sensors can play a critical role here. The aim of this study was to determine the minimum required limit of detection (LOD) of a ME sensor that can be used for this application by measuring the magnetic field induced by DBS. For this experiment, a commercial DBS system was integrated into a head phantom and placed inside of a state-of-the-art Superconducting Quantum Interference Device (SQUID)-based magnetoencephalography system. Measurements were performed and analyzed with digital signal processing. Investigations have shown that the minimum required detection limit depends on various factors such as: measurement distance to electrode, bandwidth of magnetic sensor, stimulation amplitude, stimulation pulse width, and measurement duration. For a sensor that detects only a single DBS frequency (stimulation frequency or its harmonics), a LOD of at least 0.04 pT/Hz0.5 is required for 3 mA stimulation amplitude and 60 μμs pulse width. This LOD value increases by an order of magnitude to 0.4 pT/Hz0.5 for a 1 kHz, and by approximately two orders to 3 pT/Hz0.5 for a 10 kHz sensor bandwidth. By averaging, the LOD can be reduced by at least another 2 orders of magnitude with a measurement duration of a few minutes.

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AlScN-based MEMS magnetoelectric sensor

Cited by 53 publications

References 38 publications

Magnetoelastic Coupling and Delta-E Effect in Magnetoelectric Torsion Mode Resonators

Magnetoelastic Coupling and Delta-E Effect in Magnetoelectric Torsion Mode Resonators

Roadmap on Magnetoelectric Materials and Devices

Investigation of Magnetoelectric Sensor Requirements for Deep Brain Stimulation Electrode Localization and Rotational Orientation Detection

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