2013
DOI: 10.1063/1.4798333
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AlN/single crystalline diamond piezoelectric structure as a high overtone bulk acoustic resonator

Abstract: First, the Al/AlN/Al/Cr/diamond single crystal piezoelectric layered structure has been developed, and its properties have been investigated up to 8 GHz. The peculiarities associated with the influence of piezoelectric film on the Q factor of high overtones of substrate have been pointed out. High Q ∼ 104 has been found at 6–7 GHz band.

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Cited by 43 publications
(31 citation statements)
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“…First, we expect additional refinements in device fabrication to increase the Q of our devices, which could provide at least a factor of 5 enhancement in the mechanical driving field [26]. Also, working in higher electronic purity diamond will dramatically reduce spin bath induced dephasing, and working with either a single spin or a plane of NV centers would remove dephasing from driving field inhomogeneities.…”
mentioning
confidence: 99%
“…First, we expect additional refinements in device fabrication to increase the Q of our devices, which could provide at least a factor of 5 enhancement in the mechanical driving field [26]. Also, working in higher electronic purity diamond will dramatically reduce spin bath induced dephasing, and working with either a single spin or a plane of NV centers would remove dephasing from driving field inhomogeneities.…”
mentioning
confidence: 99%
“…In comparison with FBAR the most part of such modes in the HBAR will be suppressed. 4. The arising of strongest spurious resonant peaks at frequencies above the bulk acoustic overtones is concerned with Lamb-like modes within diamond substrate, excited on the critical frequencies.…”
Section: Qexp º 10000mentioning
confidence: 99%
“…A number of substrate materials as fused quartz and silicon [1], sapphire [1,2], YAG [3], and diamond [4] have been already applied. HBAR based on synthetic diamond substrate has showed the excellent UHF resonant properties [4]. But one can observe the appearance of the additional resonant peaks which depends on the structure, dimensions and topology of thin film piezoelectric transducer (TFPT) as well as a diamond substrate thickness.…”
Section: Introductionmentioning
confidence: 99%
“…Thus, the diamond crystal is a perspective material with largest bulk acoustic wave (BAW) velocities, with low damping, high radiation stability and thermal conductivity. For example, it was shown, that diamond based HBAR can operate at frequencies up to 20 GHz [4].…”
Section: Introductionmentioning
confidence: 99%