2015 Joint Conference of the IEEE International Frequency Control Symposium &Amp; The European Frequency and Time Forum 2015
DOI: 10.1109/fcs.2015.7138866
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Resonant transformation of acoustic waves observed for the diamond based HBAR

Abstract: The resonant transformation of acoustic waves in "Al/AlN/Mo/(100) diamond" piezoelectric structure has been studied by means of 2D FEM simulation. The nature of arising acoustical modes has been defined by the detail investigation of fields of elastic displacements. It was shown that the appearance of strongest spurious resonant peaks at frequencies above the bulk acoustic overtones is concerned with Lamb-like modes within diamond substrate, excited on the critical frequencies. In these points Lamb mode transf… Show more

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Cited by 2 publications
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“…Effect of energy trapping was observed in the conventional piezoelectric resonators and was explained by authors [31] as a total internal reflection of acoustic beam on the vertical borders within the resonator's aperture. Such effect was observed in HBARs too [32], but it has a more complex nature. As an example, the appearance of energy trapping in the PLS #3 is represented in Figure 26.…”
Section: D Fem Simulation Results Of Acoustic Wave Propagation In Dimentioning
confidence: 91%
“…Effect of energy trapping was observed in the conventional piezoelectric resonators and was explained by authors [31] as a total internal reflection of acoustic beam on the vertical borders within the resonator's aperture. Such effect was observed in HBARs too [32], but it has a more complex nature. As an example, the appearance of energy trapping in the PLS #3 is represented in Figure 26.…”
Section: D Fem Simulation Results Of Acoustic Wave Propagation In Dimentioning
confidence: 91%