AlN/Pt/LN-Y128 Packageless Acoustic Wave Temperature Sensor

Floer, Cécile; Elmazria, O.; Naumenko, Natalya; Bartoli, Florian; Ghanbaja, Jaâfar; Aubert, Thierry; Hage-Ali, Sami

doi:10.1109/tuffc.2021.3057269

Cited by 2 publications

(1 citation statement)

References 15 publications

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“…Surface acoustic wave (SAW) devices have attracted increasing attention in the field of aerospace, metallurgy, fuel system health monitoring and other applications in the harsh environment such as high temperature and high pressure for their advantages of wireless communication and passive power supply [ 1 , 2 , 3 , 4 , 5 ]. At present, a single parameter device cannot satisfy the measurement requirements of in situ real-time testing of critical components in a composite environment, and multi-functional integrated sensors have become the trend of development in the future.…”

Section: Introductionmentioning

confidence: 99%

Simulation Design of Surface Acoustic Wave Sensor Based on Langasite Coplanar Integration with Multiple Parameters

Liang

Zhang

et al. 2022

Micromachines

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In the harsh environment of high temperature and high rotation, a single parameter is difficult to satisfy the multi-parameter test requirements of aerospace metallurgy. Therefore, a multi-parameter coplanar integrated surface acoustic wave (SAW) sensor based on Langasite (LGS) is proposed. In this paper, the optimal cut for different measurement parameters is analyzed, and the optimal cut to temperature, pressure and vibration are obtained. The simulation results show that (0°, 138.5°, 25°) LGS has superior second-order temperature sensitivity, the edge of the rectangular sealed cavity is more suitable for pressure sensors, and the optimal cut is (0°, 138.5°, 30°). The stress of the vibration sensor cantilever beam is mainly concentrated on the edge of the fixed end, and the optimal cut is (0°, 138.5°, 35°). Based on the optimal sensitive tangential direction of each sensitive element and the symmetry of the Langasite wafer, the reasonable layout of the coplanar integrated structure with the three parameters of temperature, pressure and vibration is determined. Moreover, according to the optimal orientation selection and reasonable structure layout of each parameter, combined with frequency separation rules, the parameters of interdigital electrode were determined, and the idea of multi-parameter integrated design was simulated and verified.

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Section: Introductionmentioning

confidence: 99%

Simulation Design of Surface Acoustic Wave Sensor Based on Langasite Coplanar Integration with Multiple Parameters

Liang

Zhang

et al. 2022

Micromachines

View full text Add to dashboard Cite

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Novel SAW Temperature Sensor with Pt/Ti/AlN/Mo/AlN/Si Structure for High Temperature Application

Ruan

Chen

et al. 2023

Chemosensors

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In this paper, a surface acoustic wave (SAW) temperature sensor with a Pt/Ti/AlN/Mo/AlN/Si structure was prepared, and the high temperature characteristics of the sensors at 20–600 °C under different electrode metallization rates (ղ) were measured. It was found that frequent device mutation occurred in the first high-temperature test, and that the mutation point decreased with the increase in the electrode metallization rate (ղ). In the subsequent test, the data became stable, the sensor’s center frequency increased, the return loss (S11) decreased and the factor of merit (Q) increased. After annealing the same sensors at 600 °C for 30 min, they could achieve performance improvement in the first test, meaning that proper annealing can improve sensor performance. In addition, the annealed SAW sensor was tested in the temperature range of 20–1000 °C, which met the requirement of a temperature range of 20–900 °C, its f–T curve was linear, the factor of merit (Q) was 34.5 and the sensitivity was 46.6 KHz/K.

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AlN/Pt/LN-Y128 Packageless Acoustic Wave Temperature Sensor

Cited by 2 publications

References 15 publications

Simulation Design of Surface Acoustic Wave Sensor Based on Langasite Coplanar Integration with Multiple Parameters

Simulation Design of Surface Acoustic Wave Sensor Based on Langasite Coplanar Integration with Multiple Parameters

Novel SAW Temperature Sensor with Pt/Ti/AlN/Mo/AlN/Si Structure for High Temperature Application

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