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Cited by 33 publications
(32 citation statements)
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“…Bonding temperature and bonding pressure were varied. A comparison of work by Shalz et al [19] (1150°C, 5.1 MPa) and that of Marks [26,52,53] (1150°C, 2.2 MPa and 7.5 MPa) suggests that increasing the pressure at 1150°C led to higher average fracture strength and reduced scatter. The improved strength characteristics appeared to correlate with more complete breakup of the copper film, which was initially ≈3 µm thick in all three cases.…”
Section: Bonding With Copper/niobium/copper Interlayersmentioning
confidence: 91%
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“…Bonding temperature and bonding pressure were varied. A comparison of work by Shalz et al [19] (1150°C, 5.1 MPa) and that of Marks [26,52,53] (1150°C, 2.2 MPa and 7.5 MPa) suggests that increasing the pressure at 1150°C led to higher average fracture strength and reduced scatter. The improved strength characteristics appeared to correlate with more complete breakup of the copper film, which was initially ≈3 µm thick in all three cases.…”
Section: Bonding With Copper/niobium/copper Interlayersmentioning
confidence: 91%
“…In bonds with polycrystalline alumina, the degree of film breakup appeared to be higher, suggesting that alumina grain boundaries and cavities may help initiate breakup [26]. Comparison of fracture surfaces from interfacial failures in bonds prepared at 1400°C from a relatively coarser (≈20-25 µm) and a finer (≈1 µm) average grain size alumina also suggested that the alumina grain boundaries and the grain boundary periodicity influenced the film evolution and fracture surface topography [53].…”
Section: Bonding With Copper/niobium/copper Interlayersmentioning
confidence: 96%
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