Conference on Lasers and Electro-Optics 2022
DOI: 10.1364/cleo_at.2022.aw4i.1
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All-Glass, Mass-Producible, Large-Diameter Metalens at Visible Wavelength for 100 mm Aperture Optics and Beyond

Abstract: We present a mass-producible, all-glass, 100 mm diameter metalens working at visible wavelengths manufactured using deep-ultraviolet projection lithography, overcoming the intrinsic exposure size limit of the lithography tool.

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Cited by 7 publications
(5 citation statements)
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“…Thanks to the rapid development of nanofabrication, the large-scale fabrication of metasurfaces is compatible with the mature CMOS technology. By combining electron beam lithography, DUV projection lithography, and nanoimprinting technologies, 41,42 the mass production costs can be greatly reduced in the future.…”
Section: Discussionmentioning
confidence: 99%
“…Thanks to the rapid development of nanofabrication, the large-scale fabrication of metasurfaces is compatible with the mature CMOS technology. By combining electron beam lithography, DUV projection lithography, and nanoimprinting technologies, 41,42 the mass production costs can be greatly reduced in the future.…”
Section: Discussionmentioning
confidence: 99%
“…The nanostructures in a metalens can be made out of a variety of materials and shapes of subwavelength dimensions, allowing for a wide range of specific optical properties. These devices are compatible with mass manufacturable processes that are used in the chip industry, which enables their fabrication in large scales, making metalenses cost-effective compared to traditional lenses [3][4][5][6].…”
Section: Motivationmentioning
confidence: 99%
“…3. This array can then be transformed into multiple rings at the sample surface, by sequentially passing through either a refractive axicon array or an axicon array phase object [14,15], and then through focusing optics. Since all the beams transmitted through the axicon array are all collinear, a single conventional focusing element can be used to form concentric rings at the sample location.…”
Section: Design 1: Axicon Cavitymentioning
confidence: 99%