2006
DOI: 10.1364/ol.31.000885
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All-fused-silica miniature optical fiber tip pressure sensor

Abstract: An all-fused-silica pressure sensor fabricated directly onto a fiber tip of 125 microm diameter is described. Simple fabrication steps include only cleaving and fusion splicing. Because no chemical processes are involved, the fabrication is easy, safe, and cost effective. Issues in sensor design and loss analysis are discussed. The sensor has been tested for static pressure response, showing a sensitivity of 2.2 nm/psi, a resolution of 0.01 psi (68.9 Pa), a hysteresis of 0.025%, and capability of operation at … Show more

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Cited by 174 publications
(89 citation statements)
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“…. These advantages make them very suitable for deployment in space-limited harsh environments such as turbine engines and power plants and in the oil and gas industry, where pressure and temperature are the two most common measurands [3][4][5][6][7]. Many methods have been developed to fabricate fiberoptic FPIs.…”
mentioning
confidence: 99%
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“…. These advantages make them very suitable for deployment in space-limited harsh environments such as turbine engines and power plants and in the oil and gas industry, where pressure and temperature are the two most common measurands [3][4][5][6][7]. Many methods have been developed to fabricate fiberoptic FPIs.…”
mentioning
confidence: 99%
“…Many methods have been developed to fabricate fiberoptic FPIs. These include using conventional hollow-core fiber [3][4][5], chemical etching [7,8], and laser micromachining [9,10]. Recently, FPIs made from hollow-core photonic bandgap fiber [11] and solid-core photonic crystal fiber (PCF) [12] by simply cleaving and splicing have been demonstrated as strain and temperature sensors.…”
mentioning
confidence: 99%
“…As one kind of optical fiber sensors [1][2][3][4][5], fiber optic Fabry-Perot interferometers (FPIs), which offer the advantages of high resolution, compact structure and immunity to electromagnetic interference, play important roles in a large number of sensing applications such as refractive index [6][7][8][9], strain [10][11][12], temperature [13][14][15], pressure [16][17][18] and so on. Among them, the Fabry-Perot cavity which is fabricated at the fiber tip can be effectively used in space limited environment.…”
Section: Introductionmentioning
confidence: 99%
“…Among them, the Fabry-Perot cavity which is fabricated at the fiber tip can be effectively used in space limited environment. A sealed fiber tip Fabry-Perot cavity can be fabricated by various techniques, such as sealing an etched multimode fiber [17,18] (or hollow core fiber [16]) by silica diaphragm, splicing a silica capillary [19] (or photonic crystal fiber [20]) to a single mode fiber and then melting it to get a micro-cavity. The sensors based on the above-mentioned techniques require two or more components or materials, which may suffer thermal instability caused by the different thermal expansion coefficients and a relatively high cost at the same time.…”
Section: Introductionmentioning
confidence: 99%
“…A pressure sensor based on micro FP cavity commonly uses an elastic diaphragm at the fiber tip such as SiO 2 /silica, polymer, silver and graphene film [12][13][14][15][16][17][18][19][20]. The pressure sensitivity of the diaphragm-based fiber tip FP sensor is defined as the ratio of the FP cavity length variation to the pressure change, which critically depends on the size and the mechanical quality of the diaphragm employed.…”
Section: Introductionmentioning
confidence: 99%