Compressible fiber optic micro-Fabry-Pérot cavity with ultra-high pressure sensitivity

Wang, Ying; Wang, Dongning; Wang, Chao; Hu, Tian

doi:10.1364/oe.21.014084

Cited by 72 publications

(46 citation statements)

References 21 publications

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“…Cavities have been realized by creating air bubbles [3,4], depositing metal [5] and dielectric [6,7] films, chemical etching [8], using FBGs as mirrors [9], or even just approaching two cleaved fibers [10]. Micromachining is a more recent technique that allows for the creation of very small cavities or microcavities.…”

Section: Introductionmentioning

confidence: 99%

Simultaneous measurement of temperature and refractive index using focused ion beam milled Fabry-Perot cavities in optical fiber micro-tips

André¹,

Warren‐Smith²,

Becker³

et al. 2016

Opt. Express

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Section: Introductionmentioning

confidence: 99%

Simultaneous measurement of temperature and refractive index using focused ion beam milled Fabry-Perot cavities in optical fiber micro-tips

André¹,

Warren‐Smith²,

Becker³

et al. 2016

Opt. Express

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“…Consequently, some amount of air remains inside the space which produces the microbubble and its position can be set at the center of the fiber if the holes inside the PCF are completely symmetric [72]. A similar micro air bubble is formed with a SMF and a silica tube by the fusion splice method to fabricate an ultrahigh sensitivity FPI pressure sensor [73]. …”

Section: Sensor Fabrication Methods Using Fabry-perot Interferometersmentioning

confidence: 99%

“…An EFPI pressure sensor showed a sensitivity of 2.75 × 10 −8 l/kPa [109]. An ultra-high FPI pressure sensor has been reported in [73] that has a sensitivity of >1,000 nm/kPa. A miniature FPI fabricated at the tip of an FBG reported in [110] exhibited a sensitivity of 0.0106 μm/psi over a range of 1.9–7.9 psi.…”

Section: Sensing Applications Of Fabry-perot Interferometersmentioning

confidence: 99%

Chronology of Fabry-Perot Interferometer Fiber-Optic Sensors and Their Applications: A Review

Islam

Ali

Lai

et al. 2014

Sensors

332

141

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Optical fibers have been involved in the area of sensing applications for more than four decades. Moreover, interferometric optical fiber sensors have attracted broad interest for their prospective applications in sensing temperature, refractive index, strain measurement, pressure, acoustic wave, vibration, magnetic field, and voltage. During this time, numerous types of interferometers have been developed such as Fabry-Perot, Michelson, Mach-Zehnder, Sagnac Fiber, and Common-path interferometers. Fabry-Perot interferometer (FPI) fiber-optic sensors have been extensively investigated for their exceedingly effective, simple fabrication as well as low cost aspects. In this study, a wide variety of FPI sensors are reviewed in terms of fabrication methods, principle of operation and their sensing applications. The chronology of the development of FPI sensors and their implementation in various applications are discussed.

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“…demonstrated an FPI-based gas pressure sensor employing a hermetic cavity and a moveable liquid level with a gas pressure sensitivity >1000 nm/kPa. However, the properties of the liquid level are greatly influenced by the temperature, and it exhibits a larger thermal expansion coefficient than either silicon or silica, so that the temperature induced cavity length change at atmospheric pressure is about 333 nm/°C 16 .…”

Section: Introductionmentioning

confidence: 99%

Nano silica diaphragm in-fiber cavity for gas pressure measurement

Liu

Wang

Liao

et al. 2017

Sci Rep

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We demonstrate an ultrahigh-sensitivity gas pressure sensor based on the Fabry-Perot interferometer employing a fiber-tip diaphragm-sealed cavity. The cavity is comprised of a silica capillary and ultrathin silica diaphragm with a thickness of 170 nm, with represents the thinnest silica diaphragm fabricated thus far by an electrical arc discharge technique. The resulting Fabry-Perot interferometer-based gas pressure sensor demonstrates a gas pressure sensitivity of about 12.22 nm/kPa, which is more than two orders of magnitude greater than that of a similarly configured fiber-tip air bubble sensor. Moreover, our gas pressure sensor has a low temperature cross-sensitivity of about 106 Pa/°C, and the sensor functions well up to a temperature of about 1000 °C. As such, the sensor can potentially be employed in high-temperature environments.

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Compressible fiber optic micro-Fabry-Pérot cavity with ultra-high pressure sensitivity

Cited by 72 publications

References 21 publications

Simultaneous measurement of temperature and refractive index using focused ion beam milled Fabry-Perot cavities in optical fiber micro-tips

Simultaneous measurement of temperature and refractive index using focused ion beam milled Fabry-Perot cavities in optical fiber micro-tips

Chronology of Fabry-Perot Interferometer Fiber-Optic Sensors and Their Applications: A Review

Nano silica diaphragm in-fiber cavity for gas pressure measurement

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