Alignment of optical axes by using electrostatic force

Kikuya, Yukio; Hirano, Motohisa; Koyabu, Kunio; Ohira, Fumikazu

doi:10.1364/ol.18.000864

Cited by 10 publications

(4 citation statements)

References 5 publications

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“…The DEP actuator reported here can be used for implementing various functions such as optical switching and coupling [21]. Using femtosecond laser machining, DEP actuation schemes can further be monolithically integrated in photonics circuits [22][23][24] or in devices combining waveguides and fluidics channels [25,26] as well as devices combining waveguides and other functional elements such as flexures [27], resonators [28] or other optical elements such as Fresnel lenses [29] and spherical lenses [30].…”

Section: Discussionmentioning

confidence: 99%

Monolithic transparent 3D dielectrophoretic micro-actuator fabricated by femtosecond laser

Yang¹,

Bellouard²

2015

J. Micromech. Microeng.

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We demonstrate a three-dimensional (3D) monolithic micro-actuator fabricated by nonablative femtosecond laser micromachining and subsequent chemical etching. The actuating principle is based on dielectrophoresis. An analytical modeling of this actuation scheme is conducted, which is capable of performance prediction, parameter optimization and instability analysis. Static and dynamic characterizations are experimentally verified. An actuation range of 30 μm is well attainable; resonances are captured with an evaluated quality factor of 40 (measured in air) and a bandwidth of 5 Hz for the primary vertical resonance of 200 Hz. A settling time of 200 ms in transient response indicates the damping properties of such actuation scheme. This actuation principle suppresses the need for electrodes on the mobile, nonconductive component and is particularly interesting for moving transparent elements. Thanks to the flexibility of the manufacturing process, it can be coupled to other functionalities within monolithic transparent micro-electro-mechanical systems (MEMS) for applications like tunable optical couplers.

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Section: Discussionmentioning

confidence: 99%

Monolithic transparent 3D dielectrophoretic micro-actuator fabricated by femtosecond laser

Yang¹,

Bellouard²

2015

J. Micromech. Microeng.

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“…Active alignment is another way of coupling optical fibers. Various actuation mechanisms, such as electrostatic force, shape memory alloy, piezoelectric effect, and thermal expansion, have been considered for active alignment (Aoshima et al, 1992;Kikuya et al, 1993;Krulevitch et al, 1996;Field et al, 1996). At present, precision active alignment methods are very expensive and bulky.…”

Section: Introductionmentioning

confidence: 99%

Active Optical Fiber Alignment with a Piezoelectric Ultrasonic Motor Integrated Into Low Temperature Cofired Ceramics

Park

Baker

Eitel

et al. 2009

Journal of Intelligent Material Systems and Structures

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The major goal of this research was to integrate an ultrasonic motor into a ceramic package for an active optical fiber alignment. Two degrees of freedom ultrasonic motor was successfully cofired with commercial low temperature cofired ceramic green tapes as well as with silver electrodes without encountering serious delamination, camber, and inter diffusion issues. High-power piezoelectric ceramics that can be sintered at 900 C was used for the ultrasonic motor. The motor successfully achieved fiber-to-laser optical alignment. Once alignment was achieved, a pre-stressed structure maintained the position of the fiber without any external electrical field or adhesive material. This package design provided a unique ability to adjust and realign an optical fiber.

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“…Reported positioning accuracy with these passive-alignment schemes is around 0.5-5 µm, which either does not meet the requirements for single-mode fiber transmission or is very expensive [9]. Active-alignment methods include electrothermal actuators [10], laser welding [11], electrostatic actuators [12], [13], piezo-actuators [14], rotational alignment [15], and manual alignment [16]. These methods can either be applied to singlefiber 1-D arrays of fibers only or are tremendously expensive in terms of manpower.…”

Section: Introductionmentioning

confidence: 99%

Microengineered Two-Dimensional Arrays of Monomode Optical Fibers

Weiland

Desmulliez

Luetzelschwab

et al. 2007

J. Microelectromech. Syst.

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In this paper, a method to manufacture 2-D bundles of single-mode optical fibers of highly accurate pitch is presented. Electrostatic actuation of the metal-clad optical fibers is performed to align the fibers with submicrometer translational alignment accuracy. The manufacturing and alignment performance characteristics of the fiber holder are fully described. The sensitivity of the active-alignment procedure for a maximum displacement up to 90 µm is between 0.125 and 1.1 µm/V, depending on the clamping distance. An alignment accuracy of around 0.2 µm can be achieved with this alignment method. The combination of the electrostatic actuation with the optical monitoring of the fiber pitch in a closed-loop feedback system provides a highly accurate and sensitive alignment system.[2006-0219]

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Alignment of optical axes by using electrostatic force

Cited by 10 publications

References 5 publications

Monolithic transparent 3D dielectrophoretic micro-actuator fabricated by femtosecond laser

Monolithic transparent 3D dielectrophoretic micro-actuator fabricated by femtosecond laser

Active Optical Fiber Alignment with a Piezoelectric Ultrasonic Motor Integrated Into Low Temperature Cofired Ceramics

Microengineered Two-Dimensional Arrays of Monomode Optical Fibers

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