Microengineered Two-Dimensional Arrays of Monomode Optical Fibers

Abstract

In this paper, a method to manufacture 2-D bundles of single-mode optical fibers of highly accurate pitch is presented. Electrostatic actuation of the metal-clad optical fibers is performed to align the fibers with submicrometer translational alignment accuracy. The manufacturing and alignment performance characteristics of the fiber holder are fully described. The sensitivity of the active-alignment procedure for a maximum displacement up to 90 µm is between 0.125 and 1.1 µm/V, depending on the clamping distance. An alignment accuracy of around 0.2 µm can be achieved with this alignment method. The combination of the electrostatic actuation with the optical monitoring of the fiber pitch in a closed-loop feedback system provides a highly accurate and sensitive alignment system.[2006-0219]

Manufacture of a 2D optical fiber array coupler with micrometer precision for laser radar applications

“…More recently, Weiland et al proposed using electrostatic actuation to manufacture a 2D fiber array with a proven accuracy of sub-micrometer. However, the manufacturing process and alignment method were quite complex and not easily adaptable to mass production [13].…”