Aligned Carbon Nanotube Arrays for Degradation‐Resistant, Intimate Contact in Micromechanical Devices

Electrostatic capacitance and Faraday cage behavior of carbon nanotube forests

“…4 Recent studies have demonstrated the integration of individual CNTs 5 and CNT forests into MEMS devices. However, contrary to the challenging integration process of individual CNTs, [5][6][7] thin film catalysts to grow CNT forests can be placed in a reliable lithographically based process.…”

“…However, contrary to the challenging integration process of individual CNTs, [5][6][7] thin film catalysts to grow CNT forests can be placed in a reliable lithographically based process. As a result, CNT forests can be produced on silicon and other high-temperature substrates, 8,9 non-horizontal surfaces, 4 and can be coated or infiltrated with other materials to form microstructured composites. 10,11 The three-dimensional geometry of CNT forests has also been exploited as a structural support for high aspect ratio micro structures, 11 a damping layer, 12 a high temperature dry adhesive material, 13 and was integrated into MEMS devices vertical comb-drive.…”

Integrated Carbon Nanotube Array as Dry Adhesive for High‐Temperature Silicon Processing

“…We synthesized the CNTs on the sidewall of every rotor and stator comb to obtain the largest possible adhesion force because the larger adhesion force may hold the strained rotor at larger angle. For this angular fixation, high‐density CNTs were vertically grown on the surface of microstructures, similarly to the method demonstrated in previously reported works to selectively integrate aligned CNTs on MEMS structures 23–25. After the plastic deformation process, the CNT arrays were no longer necessary and were removed by oxidizing in air (Figure 1d).…”

Scalable and number-controlled synthesis of carbon nanotubes by nanostencil lithography

“…Examples of such devices include nanoelectronic devices and optoelectronic components [2-4], actuators and oscillators [5-7], memory devices and switches [8,9], and mechanical, chemical, biological, and thermal sensors [10-13]. Controlling the number of CNTs synthesized and their specific placement on nanostructures and microstructures is critical to using the inherent properties of massively parallel-integrated CNTs for practical device applications.…”