Algorithms For Coupled Domain Mems Simulation

Abstract

The performance of micro-electro-mechanical systems depends on the interaction between electrical, mechanical, and fluidic forces. Simulating this coupled problem is made more difficult by the fact that most MEMS devices are innately threedimensional and geometrically complicated. It is possible to simulate efficiently these devices using domain-specific solvers, provided the coupling between domains can be handled effectively. In this paper we will survey recent developments in coupled-domain simulation, and give computational comparisons between relaxation, multi-level Newton, and Newton-Iterative methods for 3-D electromechanical analysis.

Simulation of fluid-structure interaction in micropumps by coupling of two commercial finite element programs

“…(8) . Its evaluation requires the explicit knowledge of the vector functions gs and g, which we introduced in section 3 to represent the two "black box" finite element solver.…”

“…MF 0 )<1 (8) where p is the spectral radius of the coefficient matrix." Since M5 and MF are not known explicitly, the convergence criteria can not be evaluated directly.…”

Mechatronic Systems

“…In addition there are taps and summing points, so that the important elements of block diagrams can be fully represented in Figure 3. 8.…”