2010
DOI: 10.1063/1.3515903
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AlGaN solar-blind avalanche photodiodes with high multiplication gain

Abstract: We report the fabrication and characterization of the solar-blind AlGaN avalanche photodiodes grown by metal-organic chemical vapor deposition on c-plane sapphire substrate. The fabricated devices with 100 μm diameter active area exhibit a peak responsivity of 79.8 mA/W at 270 nm and zero bias, corresponding to an external quantum efficiency of 37%. Multiplication gains as high as more than 2500 were obtained in these devices.

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Cited by 95 publications
(44 citation statements)
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“…One solution is to separate the absorption layer and the multiplication layer by a thin n-type charge layer, this so-called back-illuminated separate absorption and multiplication (SAM) GaN APDs 7 can effectively suppress electrons injected into multiplication layer, allowing for nearly pure hole multiplication and thus enhance gain as well as reduce noise. Since the first SAM GaN APD was proposed and demonstrated by Pau 8 in 2008, variations in this basic structure, including SAM GaN/SiC APDs 9 and SAM AlGaN solar-blind APDs, 10,11 have been reported. However, few works give a full theoretical description on SAM GaN-based APDs for further structural optimization, especially the dependence of gain characteristics on environmental temperature and device dimension.…”
mentioning
confidence: 99%
“…One solution is to separate the absorption layer and the multiplication layer by a thin n-type charge layer, this so-called back-illuminated separate absorption and multiplication (SAM) GaN APDs 7 can effectively suppress electrons injected into multiplication layer, allowing for nearly pure hole multiplication and thus enhance gain as well as reduce noise. Since the first SAM GaN APD was proposed and demonstrated by Pau 8 in 2008, variations in this basic structure, including SAM GaN/SiC APDs 9 and SAM AlGaN solar-blind APDs, 10,11 have been reported. However, few works give a full theoretical description on SAM GaN-based APDs for further structural optimization, especially the dependence of gain characteristics on environmental temperature and device dimension.…”
mentioning
confidence: 99%
“…[1][2][3][4] GaN based opto-electronic devices such as light emitting diodes, avalanche photodiodes, and electronic devices such as high electron mobility transistors (HEMTs) require good quality Schottky contacts for a reliable performance. [5][6][7][8] For HEMT applications, a Schottky gate contact with large barrier height is always desirable to achieve improved transconductance, maximum drain current and high breakdown voltage of the device. It also results in small gate leakage current, thus reducing the noise level.…”
Section: Introductionmentioning
confidence: 99%
“…State-of-the-art SiC APDs employing a recessed top window exhibit peak quantum efficiency (QE) of 60% at 268 nm, k factor of ~ 0.1, and dark current of 90 pA at a gain of 1000 (6,7). These dark currents are approximately three orders of magnitude lower than what has been reported for Al x Ga 1-x N based APDs (2,5) However, the responsivity of these devices diminishes at wavelengths shorter than 260 nm due to increasing absorption and carrier generation in the top doped layer of this device, the short diffusion length of minority carriers in this region, and the presence of a high density of surface states.…”
Section: Introductionmentioning
confidence: 83%