Cold atmospheric plasma (CAP) treatment of biological surfaces results in important changes of biological functions, but little knowledge on specific surface-chemical changes is available. We measured surface-bound NO 3 on polymer and biomolecular films after CAP treatment. An O 2 /N 2 -based surface microdischarge was used to deactivate lipopolysaccharide (LPS), an immune-stimulating biomolecule found in Gram negative bacteria. The observed LPS biodeactivation was highest for low N 2 concentrations in O 2 , increased roughly linearly with surface NO 3 , and then saturated. NO 3 was also observed after treatment by a very different source: an atmospheric pressure plasma jet operating with an Ar carrier gas. Thus, NO 3 formation is a generic surface chemical modification of these materials by CAP sources.