Air-Cavity Transmission Lines on Anodized Aluminum for High-Performance RF Modules

Micro-patterning of porous alumina layers with aligned nanopores

“…Due to its tunable porosity, its electrical insulation and its chemical resistance, PAA has been used in many applications such as; dyeing of aluminum layers [1], humidity sensors [8], microcantilevers [9], antireflection structures [10], photonics crystals [11], insulating layers for electronic devices [12,13] and hermetic packaging for microsystems [13][14][15]. Moreover, due to its capillaries, high aspect ratio structures of alumina were fabricated [9,16,17] and due to its nanometer-range porosity, PAA was employed, as a template or as a mask for the fabrication of nanostructured materials [18], nanotubes [19,20], nanowires [21,22], nanoholes [23] and nanodots [24].…”