Air and Vacuum Annealing Effect on the Highly Conducting and Transparent Properties of the Undoped Zinc Oxide Thin Films Prepared by DC Magnetron Sputtering
Lamia Radjehi,
Linda Aissani,
Abdelkader Djelloul
et al.
Abstract:In this study, we aim to investigate the effect of zinc interstitials (Zni) and oxygen vacancies (VO) on the ZnO electrical conductivity. ZnO films were synthesized via DC magnetron sputtering process using pure Zn target in gases mixture of Ar/O2 = 80/17.5 (sccm). In order to improve the optical and electrical prosperities, the obtained films were subjected to air and vacuum annealing treatment. Several techniques such as field emission scanning electron microscopy (FESEM), Grazing Incidence X-ray Diffraction… Show more
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