2000
DOI: 10.1109/6040.846631
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Agilent technologies' singlemode small form factor (SFF) module incorporates micromachined silicon, automated passive alignment, and non-hermetic packaging to enable the next generation of low-cost fiber optic transceivers

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Cited by 12 publications
(2 citation statements)
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“…Most of them make use of the mechanical and chemical properties of silicon using well known MEMS technologies like wet KOH etching and DRIE plasma etching to allow fiber being guided into grooves in front of active dies like photodiodes, laser diodes or waveguides. These works have been reported in many publications and books [1][2][3][4].…”
Section: Introductionmentioning
confidence: 87%
“…Most of them make use of the mechanical and chemical properties of silicon using well known MEMS technologies like wet KOH etching and DRIE plasma etching to allow fiber being guided into grooves in front of active dies like photodiodes, laser diodes or waveguides. These works have been reported in many publications and books [1][2][3][4].…”
Section: Introductionmentioning
confidence: 87%
“…These connections require high optical coupling efficiency and long-term stability for optical communications networks. Passive alignment is a cheap, fast, and simple aligning solution (Kosaka et al, 1996;Owen, 2000). In order to obtain the desired coupling efficiency, alignment tolerances of <100 nm are required.…”
Section: Introductionmentioning
confidence: 99%