Thin-metal films can be challenging
to process at ultrathin
thicknesses
(≲10 nm) due to poor wetting (or surface tension compatibility)
at dielectric interfaces. Typical thickness dimensions required to
induce the onset of coalescence is usually ≳20 nm. Films <20
nm in thickness can result in non-ideal process-dependent film uniformity
and morphology that prevent controlled and repeatable ultrathin-film
optical properties and behavior. Such thickness limitations undesirably
constrain the design and integration of thin-metal films into high-precision
multilayer optical coatings (e.g., narrow bandpass filters and induced
transmission filters). The co-sputtering of nanocomposite metal–dielectric
films offers an appealing route toward ultrathin film coalescence
and tailorable optical properties to achieve high-precision optical
performance at significantly reduced film thicknesses (e.g., as compared
to conventional all-dielectric multilayer optical media). In this
work, silver (Ag) nanoparticles and contiguous Ag networks embedded
in a silicon dioxide (SiO2) matrix were prepared at ambient
substrate temperature via magnetron co-sputtering in a controlled
pure argon atmosphere. We show that the structural features and optical
properties of nanocomposite Ag–SiO2 films can be
manipulated by varying the co-sputtering duration at ∼3–10
nm film thicknesses. Here, the Ag material phase ranges in structure
from dispersed nanoparticles to contiguous partially coalesced networks.
A distinct optical response transition occurs upon Ag phase transition
from nanoparticles to the partially coalesced network. Large differences
in the measured optical intensity are observed at these reduced film
thicknesses: maximum ΔT = 67%, ΔR = 28%, and ΔA = 46% in the visible
and near-infrared regions. Overall, our work shows the tailoring of
ultrathin-metal-film optical properties (i.e., the refractive index, n, and extinction coefficient, k) and is
expected to provide implementable methodologies toward the design,
deposition, and integration of next-generation complex index multilayer
optical filters and mirrors exhibiting enhanced precision spectral
performance.