We study the aggregation of silver (Ag) atoms deposited on silicone oil surfaces. It is observed that the apparent Ag coverage of the total area, &, increases linearly with the nominal film thickness h for h < 0:9 nm and its slope k decreases clearly as the deposition flux f increases. Our atomic force microscopy (AFM) observation shows that the average thickness of the atomic aggregates first increases with f , and then approaches a saturation value. Then, the aggregation mechanism of Ag atoms is presented.