The primary stages of the oxidation of NiCr23 and of NiCr21Fe12 and the final oxide layers were studied at room temperature and oxygen pressures between 10−6 Pa and 10−4 Pa using AES and XPS. The composition of the surface during oxygen exposure was monitored by continuous recording of the Auger transitions M23 VV and L3M23V of the metallic components and the KL23L23 transition of oxygen. The low energy M23VV transitions are especially indicative of the present chemical state which is additionally characterized by the 2p photoelectron spectra. After different oxygen exposures, the thickness of the oxide layers was determined by angle resolved AES, XPS results, and by sputter depth profiling which also gives the elemental in depth distribution. It is concluded that the initial preferential oxidation of Cr is followed by a surface enrichment and oxidation of the remaining elements with lower affinity to oxygen, i.e. Ni in NiCr and both Ni and Fe in NiCrFe.