1992
DOI: 10.1111/j.1151-2916.1992.tb04413.x
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Aerosol Synthesis of Aluminum Nitride Powder Using Metalorganic Reactants

Abstract: We describe a new laboratory-scale aerosol process for making submicrometer AIN powder by the reaction of gas phase AI(C,H,), and NH,. The process can produce spherical, near-stoichiometric AIN powder with mean particle diameter ranging from 0.07 to 0.20 pm and polydispersity index between 0.2 and 0.5. The inlet TEA concentration is found to have the greatest effect on particle size, with the furnace temperature and carrier gas flow rate having lesser influence. Our results appear to favor a LaMer-type mechani… Show more

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Cited by 30 publications
(11 citation statements)
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“…27 Similar disadvantages prevent the sublimationrecrystallization method from being widely adopted. 28 Aerol synthesis involves complicated procedures and needs expensive metalorganic reactants; 29 it is therefore not suitable for large-scale applications. Very few methods have been documented to synthesize AlN nanowires thinner than 50 nm, and synthesis of AlN nanowires with controlled diameter has not been reported yet.…”
Section: Introductionmentioning
confidence: 99%
“…27 Similar disadvantages prevent the sublimationrecrystallization method from being widely adopted. 28 Aerol synthesis involves complicated procedures and needs expensive metalorganic reactants; 29 it is therefore not suitable for large-scale applications. Very few methods have been documented to synthesize AlN nanowires thinner than 50 nm, and synthesis of AlN nanowires with controlled diameter has not been reported yet.…”
Section: Introductionmentioning
confidence: 99%
“…Durch eine gröûere Brennergeometrie soll der Prozess auf eine Rate von 1 kg/h gesteigert werden [59,60]. [62] oder GaAs [63].…”
Section: Chemische Dampf-kondensationunclassified
“…It is a promising advanced ceramic material with many excellent properties such as high band gap of around 6.2 eV, high electrical resistivity (10 13 ), small dielectric constant (8.8 at 1 MHz), and low thermal expansion coefficient (which closely matched that of silicon, 4.7×10 −6 K −1 ) [1,2]. Many methods have been reported on the production of AlN powders including direct nitridation of Al metal in N 2 or NH 3 atmosphere, carbothemal reduction of Al 2 O 3 in Al 2 O 3 -C-N 2 system or Al 2 O 3 -NH 3 -C 3 H 8 system [3][4][5], vapor phase synthesis [6,7], plasma synthesis [8,9], and self-propagating high temperature synthesis [10,11]. Among them, two primary processes to manufacture AlN powders commercially are direct nitridation and carbothermal reduction [12].…”
Section: Introductionmentioning
confidence: 98%