Aerosol based direct-write micro-additive fabrication method for sub-mm 3D metal-dielectric structures

Abstract

The fabrication of 3D metal-dielectric structures at sub-mm length scale is highly important in order to realize low-loss passives and GHz wavelength antennas with applications in wearable and Internet-of-Things (IoT) devices. The inherent 2D nature of lithographic processes severely limits the available manufacturing routes to fabricate 3D structures. Further, the lithographic processes are subtractive and require the use of environmentally harmful chemicals. In this letter, we demonstrate an additive manufacturing method to fabricate 3D metal-dielectric structures at sub-mm length scale. A UV curable dielectric is dispensed from an Aerosol Jet system at 10-100 µm length scale and instantaneously cured to build complex 3D shapes at a length scale <1 mm. A metal nanoparticle ink is then dispensed over the 3D dielectric using a combination of jetting action and tilted dispense head, also using the Aerosol Jet technique and at a length scale 10-100 µm, followed by the nanoparticle sintering. Simulation studies are carried out to demonstrate the feasibility of using such structures as mm-wave antennas. The manufacturing method described in this letter opens up the possibility of fabricating an entirely new class of custom-shaped 3D structures at a sub-mm length scale with potential applications in 3D antennas and passives.

Structure, electrical characteristics, and high-temperature stability of aerosol jet printed silver nanoparticle films

“…Such methods provide fast, inexpensive, and environmentally friendly patterning of nanoparticle (NP) based films. 8 These films, when sintered, can exhibit an electrical conductivity of up to 50% of the bulk value 9 and have a very high surface to volume ratio that may help to reduce the build-up of stresses. The AJ method utilizes a mist of NP inks directed by a carrier gas, and can print inks with viscosities up to 1000 cP and feature sizes down to 10 lm.…”

CMU Array: A 3D Nano-Printed, Customizable Ultra-High-Density Microelectrode Array Platform

“…Such a construct can be used as microneedles for drug delivery and/or extraction of fluids; all while recording the bioelectric signals. The current method can also be combined with printing of three dimensional transparent polymers 18 to construct optic-fiber paired probes for optogenetic stimulation and recording of neural signals. Lastly, the microelectrodes can be used in non-biological applications such as changing surface hydrophobicity through texturing, increasing energy storage in batteries through an increase in the surface area, and specific sensor devices.…”

“…Recently, 3D nanoparticle printing has emerged as a new method to fabricate electronic devices that either complements lithography or fills in the critical length-scale gaps left by current methods. 16 Microelectronics fabrication by inkjet 17 and aerosol jet 18 nanoparticle printing offers the freedom to use the target material in nano-dispersion form. This process enables rapid changes to the device layouts and the use of a variety of substrates to fabricate devices on, including flexible polymers.…”

Three-dimensional microarchitected materials and devices using nanoparticle assembly by pointwise spatial printing

“…Printing of nanoparticles over the surfaces of 3D components, such as hemispherical domes ( 11 ) or pillars ( 13 ), has been demonstrated for antenna applications. A continuous dispense of nanoparticle dispersion from a micronozzle was used to make nonintersecting structures/motifs in 3D ( 12 ).…”