Advancing the Hexapole Cs-Corrector for 
the Scanning Transmission Electron Microscope

Müller, Heiko; Uhlemann, Stephan; Hartel, Peter; Haider, Maximilian

doi:10.1017/s1431927606060600

Cited by 113 publications

(69 citation statements)

References 11 publications

(1 reference statement)

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“…The instrument uses the standard three-condenser lens system of the Titan 80-300 column to provide variable probe convergence angles in STEM mode and adjustable parallel illumination in TEM mode. An advanced probe corrector derived from the hexapole-type corrector from CEOS corrects for objective lens illumination aberrations (Haider et al 2000;Müller et al 2006). The imaging aberration corrector is a hexapole-type corrector from CEOS (Haider et al 1998).…”

mentioning

confidence: 99%

“…Both correctors on TEAM 0.5 correct for coherent lens aberrations, in particular the spherical aberration of the objective lens, and partially for higher order aberrations and resulting parasitic aberrations. The correctors impose a slight increase in the chromatic aberration of the system, changing the inherent C c of the objective lens from 1.64 to approximately 2.1 mm with the correctors activated, for both TEM and STEM operating modes.The illumination aberration corrector is an improved version of the hexapole corrector (Haider et al 2000), suitably upgraded to minimize the impact of sixfold astigmatism A 5 (Müller et al 2006). It is configured to fully correct coherent axial aberrations up to fifth-order spherical aberration C 5 .…”

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Background, status and future of the Transmission Electron Aberration-corrected Microscope project

Dahmen

Erni

Radmilović

et al. 2009

Phil. Trans. R. Soc. A.

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The strong interaction of electrons with small volumes of matter make them an ideal probe for nanomaterials, but our ability to fully use this signal in electron microscopes remains limited by lens aberrations. To bring this unique advantage to bear on materials research requires a sample space for electron scattering experiments in a tunable electron-optical environment. This is the vision for the Transmission Electron Aberrationcorrected Microscope (TEAM) project, which was initiated as a collaborative effort to re-design the electron microscope around aberration-correcting optics. The resulting improvements in spatial, spectral and temporal resolution, the increased space around the sample and the possibility of exotic electron-optical settings will enable new types of experiments. This contribution will give an overview of the TEAM project and its current status, illustrate the performance of the TEAM 0.5 instrument, with highlights from early applications of the machine, and outline future scientific opportunities for aberration-corrected microscopy.Keywords: aberration correction; depth sectioning; monochromator; single-atom detection; light atom imaging; electron microscopy Overview of the Transmission Electron Aberration-corrected Microscope projectRecent advances in aberration-correcting electron optics have led to increased resolution, sensitivity and signal-to-noise (S/N) ratio in atomic resolution microscopy. These advances have created the opportunity to directly observe the atomic-scale order, electronic structure and dynamics of individual nanoscale objects by advanced transmission electron microscopy (TEM). To take advantage of this opportunity, the Transmission Electron Aberration-corrected Microscope (TEAM) project was initiated to optimize the electron microscope around aberration-corrected electron optics and to further advance the limits of the instrument and the technique. The project brings together several leading microscopy groups supported by the US Department of Energy's (DOE's) Office *Author for correspondence (udahmen@lbl.gov).One contribution of 14 to a Discussion Meeting Issue 'New possibilities with aberration-corrected electron microscopy'. http://www.science.doe.gov). After its completion, the instrument will be made available to the scientific user community at the National Center for Electron Microscopy (NCEM).The vision for the TEAM project is the idea of providing a sample space for electron scattering experiments in a tunable electron-optical environment by removing some of the constraints that have limited electron microscopy until now. The resulting improvements in spatial, spectral and temporal resolution, the increased space around the sample and the possibility of setting up novel electronoptical configurations will enable new types of experiments in electron scattering. The TEAM microscope will feature unique corrector elements for spherical and chromatic aberrations, a novel atomic-force-microscopy-inspired specimen stage, a high-brightness gun and numerous other in...

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Background, status and future of the Transmission Electron Aberration-corrected Microscope project

Dahmen

Erni

Radmilović

et al. 2009

Phil. Trans. R. Soc. A.

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“…Atomic-scale renditions of the interface structure have been primarily accomplished through high-resolution transmission electron microscope (HRTEM) phase-contrast images (and simulations) that allow for identification of the positions of atomic columns and structural defects at the interface [4,5]. Recent advances in HRTEM and HRSTEM have been enabled by the development of spherical aberration correctors for the electron probe as well as the image [6][7][8].In parallel, developments in first-principles based electronic structure calculations and larger scale atomistic modeling tools permit more accurate simulations of the interface structure [9,10]. Recent atomistic simulations of the interface between an ordered precipitate and disordered matrix in a nickel-base superalloy indicate that the interface is not abrupt at the atomic scale [9].…”

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confidence: 99%

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Atomic Scale Structure and Chemical Composition across Order-Disorder Interfaces

et al. 2009

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Through a combination of aberration-corrected high-resolution scanning transmission electron microscopy and three-dimensional atom probe tomography, the true atomic-scale structure and change in chemical composition across the complex order-disorder interface in a metallic alloy has been determined. The study reveals the presence of two interfacial widths, one corresponding to an order-disorder transition, and the other to the compositional transition across the interface, raising fundamental questions regarding the definition of the interfacial width in such systems. DOI: 10.1103/PhysRevLett.102.086101 PACS numbers: 68.35.Àp, 68.37.Ma, 68.37.Vj Interfaces play an important role in determining several properties in multiphase systems [1][2][3]. Atomic-scale renditions of the interface structure have been primarily accomplished through high-resolution transmission electron microscope (HRTEM) phase-contrast images (and simulations) that allow for identification of the positions of atomic columns and structural defects at the interface [4,5]. Recent advances in HRTEM and HRSTEM have been enabled by the development of spherical aberration correctors for the electron probe as well as the image [6][7][8].In parallel, developments in first-principles based electronic structure calculations and larger scale atomistic modeling tools permit more accurate simulations of the interface structure [9,10]. Recent atomistic simulations of the interface between an ordered precipitate and disordered matrix in a nickel-base superalloy indicate that the interface is not abrupt at the atomic scale [9]. While the implications of these results on the microstructural stability [11][12][13] and high temperature mechanical properties [14][15][16][17][18][19] are substantial, there is no clear experimental evidence confirming these atomistic simulations. The limitations associated with the resolution of experimental techniques have so far prevented direct atomic-scale imaging and interpretation of the structural and compositional transition across such interfaces. Techniques such as 3D Atom Probe (3DAP) Tomography have enabled detailed exploration of nanometer-scale elemental partitioning across interphase interfaces, including the = 0 interface in nickel base alloys [20][21][22][23][24][25][26]. In addition, developments in aberrationcorrected HRSTEM now permit Z contrast imaging (arising from the differences in atomic numbers) and interpretation at atomic resolution [27][28][29]. Our study provides direct experimental evidence at the atomic scale of the true structure and composition of the = 0 interface in a nickel base alloy by coupling two advanced and complementary techniques: aberration-corrected HRSTEM and 3DAP.This work was carried out on the nickel base superalloy Rene' 88 DT [nominal composition 55.63Ni-18.02Cr-13.00Co-4.74Ti-4.45Al-2.48Mo-1.21W-0.46Nb (in at %)], with superior creep and fatigue properties for turbine disk applications [14][15][16]. The typical microstructure consists of a disordered fcc matrix with ordered ...

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“…[3][4][5][6][7]. Aberration correctors can be used either post-specimen to improve image resolution and contrast in transmission electron microscopy (TEM) [1] or pre-specimen to produce a more sharply focused probe for scanning transmission electron microscopy (STEM) [2,8].…”

Section: Introductionmentioning

confidence: 99%

Aberration corrected STEM by means of diffraction gratings

Linck¹,

Ercius

Pierce

et al. 2017

Ultramicroscopy

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Abstract:In the past 15 years, the advent of aberration correction technology in electron microscopy has enabled materials analysis on the atomic scale. This is made possible by complex arrangements of multipole electrodes and magnetic solenoids to compensate the aberrations inherent to any focusing element of an electron microscope. Here, we describe an alternative method to correct for the spherical aberration of the objective lens in a scanning transmission electron microscopy (STEM) using a passive, nanofabricated diffractive optical element. This holographic device is installed in the probe forming aperture of a conventional electron microscope and can be designed to remove arbitrarily complex aberrations from the electron's wave front. In this work, we show a proof of principle experiment that demonstrates successful correction of the spherical aberration in STEM by means of such a grating corrector (GCOR). Our GCOR enables us to record aberration-corrected high-resolution HAADF STEM images, although yet without any improvement in probe current and resolution. Author Contact Information:Dr. Martin Linck, CEOS GmbH, Englerstr. 28, D-69126 Heidelberg, Germany

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Advancing the Hexapole C_s-Corrector for the Scanning Transmission Electron Microscope

Cited by 113 publications

References 11 publications

Background, status and future of the Transmission Electron Aberration-corrected Microscope project

Background, status and future of the Transmission Electron Aberration-corrected Microscope project

Atomic Scale Structure and Chemical Composition across Order-Disorder Interfaces

Aberration corrected STEM by means of diffraction gratings

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Advancing the Hexapole Cs-Corrector for the Scanning Transmission Electron Microscope

Cited by 113 publications

References 11 publications

Background, status and future of the Transmission Electron Aberration-corrected Microscope project

Background, status and future of the Transmission Electron Aberration-corrected Microscope project

Atomic Scale Structure and Chemical Composition across Order-Disorder Interfaces

Aberration corrected STEM by means of diffraction gratings

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Advancing the Hexapole C_s-Corrector for the Scanning Transmission Electron Microscope