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1996
DOI: 10.1557/proc-426-165
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Advanced Stacked Elemental Layer Process for Cu(InGa)Se2 Thin Film Photovoltaic Devices

Abstract: Targeting large area and low cost processing of highly efficient thin film solar modules an advanced stacked elemental layer process for Cu(InGa)Se2 (CIGS) thin films is presented. Key process steps are i) barrier coating of the soda lime glass substrate combined with the addition of a sodium compound to the elemental Cu/In/Ga/Se-precursor stack and ii) rapid thermal processing (RTP) to form the CIGS compound.By this strategy exact impurity control is achieved and the advantageous influence of sodium on device… Show more

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Cited by 78 publications
(34 citation statements)
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“…[29,33] A thin film of SiO x , Al 2 O 3 , or Si x N y acts as an efficient barrier against Na diffusion. [25,27] This provides further support for linking Na to out-diffusion from the SLG. We also note that high Na concentrations, similar to those obtained from growth on SLG, may be ªartificiallyº introduced into the CIGS films by ion implantation [26] or by using a Na-containing precursor.…”
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confidence: 76%
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“…[29,33] A thin film of SiO x , Al 2 O 3 , or Si x N y acts as an efficient barrier against Na diffusion. [25,27] This provides further support for linking Na to out-diffusion from the SLG. We also note that high Na concentrations, similar to those obtained from growth on SLG, may be ªartificiallyº introduced into the CIGS films by ion implantation [26] or by using a Na-containing precursor.…”
mentioning
confidence: 76%
“…[25,26] Na was found to reside primarily at grain boundaries by comparing a secondary ion mass spectroscopy (SIMS) map with a scanning electron microscopy (SEM) picture [25] and the Na profile to the grain boundary density. [27] If spherical grains (or cylindrical grains of any aspect ratio) of~1 mm diameter are assumed, a concentration of 10 19 ±10 20 cm ±3 distributed on grain boundaries implies at least 0.1 monolayer coverage of Na on each grain. .…”
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confidence: 99%
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