Advanced industrial S/TEM automation and metrology: Boundary of precision

Tan, Haiyan; Weng, Wen Jian; Rai, R.; Kang, Chris; Dumas, Laurent; Brooks, Irene; Katnani, Ahmad D.; Zhong, Ziyang; Hakala, Chris; Lu, Ying-Gang; Fretwell, J.; Johnson, Timothy A.

doi:10.1109/asmc.2018.8373156

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Advanced industrial S/TEM automation and metrology: Boundary of precision

Cited by 4 publications

References 6 publications

Identification of Failure Modes for Circuit Samples with Confounded Causes of Failure

Identification of Failure Modes for Circuit Samples with Confounded Causes of Failure

Extension of CD-TEM Towards 3D Elemental Mapping

Evaluation of the accuracy and precision of STEM and EDS metrology on horizontal GAA nanowire devices

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