International Conference on Information Science and Technology 2011 Help me understand this report
Advanced design of microbolometers for uncooled infrared detectors
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2012
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“…In addition, the DSI results (Fig. 7) suggest that PECVD SiNx films could provide higher mechanical stability than SiOx films, being the second advantage for the former in fabricating suspended microbridges, as indicated by finite element analysis (FEA) simulations [28]. Considering four kinds of Si-N groups contained in the resulting SiNx films (Fig.…”
Section: Discussionmentioning
confidence: 97%
“…In addition, the DSI results (Fig. 7) suggest that PECVD SiNx films could provide higher mechanical stability than SiOx films, being the second advantage for the former in fabricating suspended microbridges, as indicated by finite element analysis (FEA) simulations [28]. Considering four kinds of Si-N groups contained in the resulting SiNx films (Fig.…”
Section: Discussionmentioning
confidence: 97%
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