It is known that individual metal atoms on insulating ionic films can occur in several different (meta) stable charge states, which can be reversibly switched in a controlled fashion. Here we show that the diffusion of gold adatoms on NaCl thin films depends critically on their charge state. Surprisingly, the anionic species has a lower diffusion barrier than the neutral one. Furthermore, for the former we observe that the diffusion atop a bilayer of NaCl is strongly influenced by the interface between NaCl and the underlying copper substrate. This effect disappears for a trilayer of NaCl. These observations open the prospect of controlling the diffusion properties of individual metal atoms on thin insulating films. DOI: 10.1103/PhysRevLett.117.146102 A most interesting finding is the observation that metal atoms on insulating films can exhibit several different charge states, which can be controlled on the level of individual atoms in the junction of a scanning probe microscope [1][2][3][4][5][6][7][8][9][10]. As the charge state of an adsorbate is decisive for many of its physical and chemical properties, a control of the charge state offers the prospect of controlling adsorbates in many other aspects, ranging from their spin degrees of freedom [6,7] to their catalytic activity [11]. Although the possibility of controlling the diffusion properties by means of charge-state manipulation was briefly mentioned [1], no corresponding experiments were reported so far.Here we show from scanning tunneling microscopy (STM) experiments that the diffusion behavior of individual gold adatoms on ultrathin NaCl films depends strongly on its charge state and can therefore be controlled by means of STM-based manipulation [1]. Somewhat surprisingly, the negatively charged gold anions diffuse more readily as compared to the neutral ones. This result is rationalized in view of a recent analysis of the different possible adsorption sites of these adsorbates [10]. We further observe that Au anions on a bilayer of NaCl on Cu(111) show a diffusion pattern corresponding to the moiré pattern of the interface of NaCl to the underlying metal substrate. Apparently, the ionic relaxations in the polar insulating film that are present around negatively charged Au − anions [1,12] interact with the bucklings of ions in bilayer NaCl films that arise from the incommensurate interface with the substrate.The experiments were carried out with two homebuilt low-temperature STM apparatuses with a base temperature of 5 K. NaCl was evaporated thermally onto a clean Cu(111) single-crystal surface such that defect-free (100)-terminated NaCl bilayer islands were formed [13] with smaller patches of a third NaCl(100) layer on top of them. Gold atoms were deposited with the sample inside the STM at T < 10 K. All voltages refer to the sample bias with respect to the tip. For our diffusion study, many sequences of STM images were recorded at different temperatures. The temperature was stabilized by heating the entire STM head, being thermally only weakly co...