Adhesive force of the microstructures measured by the atomic force microscope

Torii, Akihiro; Sasaki, Minoru; Hane, Kazuhiro; Okuma, Shigeru

doi:10.1109/memsys.1993.296962

Cited by 7 publications

(5 citation statements)

References 9 publications

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“…In this case an intermediate material is introduced between the silicon substrate surface and the polysilicon beam surface. The adhesive strength of solid bridging is high [17] but difficult to estimate and is dependent on the type and amount of residue material.…”

Section: Hydrogen Bridgingmentioning

confidence: 99%

Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms

Legtenberg

Tilmans

Elders

et al. 1994

Sensors and Actuators A: Physical

188

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The mechanisms causing stiction of polysilicon structures fabricated by surface micromachining techniques have been investigated. It is found that during drying from rinse liquids attractive dynamic capillary forces are responsible for bringing micromechanical structures into contact with the underlying substrate. Measured adhesion energies of sticking microbridges indicate that van der Waals forces are responstble for the stiction of hydrophobic surfaces and that hydrogen bridging is an additional adhesion mechanism for hydrophilic surfaces. Methods to reduce the stiction problem are indicated.

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Section: Hydrogen Bridgingmentioning

confidence: 99%

Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms

Legtenberg

Tilmans

Elders

et al. 1994

Sensors and Actuators A: Physical

188

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show abstract

“…2 [Torii93] reflection can be exactly correlated to the probe movement. Instead of a piezotransformer, the probe in the SFM instrument is fastened to a tiny cantilever beam having a small spring constant.…”

Section: Manufacturing and Metrologymentioning

confidence: 96%

“…These microscopes have a very high resolution of about 0.3 nm and can even follow the manipulations of an individual atom [Torii93). !ill, and a newcomer, the scanning probe microscopy (SPM).…”

Section: Manufacturing and Metrologymentioning

confidence: 99%

Microsystem Technology and Microrobotics

Fatikow

Rembold

1997

114

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“…The study on the interaction of micro/nano objects with various surfaces has attracted growing interest in recent decades [1][2][3][4][5][6]. Developments of micro and sub-micro electronics and the research on the interactions of biological objects with various functionalized surfaces in the biomedical, biochemical and pharmaceutical industry have been a driving force [7,8].…”

Section: Introductionmentioning

confidence: 99%

The study of an interaction of solid particles with various surfaces using TSM sensors

Zhang

Lec

Pourrezaei

IEEE International Frequency Control Sympposium and PDA Exhibition Jointly With the 17th European Frequency and Time Forum, 200

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The interaction of solid particles with various surfaces has been experiencing growing interest in the area of nanotechnology, colloidal science and biology. In this paper interactions of solid particles with various surfaces using piezoelectric Thickness Shear Mode (TSM) sensors have been studied. A mechanical model has been presented to evaluate the effect of particle loading on the behavior of a TSM sensor. The main sources contributing to the interaction, such as Van der Waals force, gravitational force and electrostatic force, are discussed. Experimental results have shown that the resonant frequency of a TSM sensor depends on the coupling conditions of micro-or nano-particles loaded on the surfaces of a TSM sensor, which is predicted by the theoretical model. The results show that this TSM sensor technique can provide the information of the coupling, such as the binding energy between the particles and the sensor surfaces, and may promote the applications of TSM sensors in characterizing the properties of the loaded particles.

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Adhesive force of the microstructures measured by the atomic force microscope

Cited by 7 publications

References 9 publications

Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms

Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms

Microsystem Technology and Microrobotics

The study of an interaction of solid particles with various surfaces using TSM sensors

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