2010
DOI: 10.1088/0022-3727/43/17/175301
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Adhesion enhancement of hard coatings deposited on flexible plastic substrates using an interfacial buffer layer

Abstract: An interfacial buffer layer has been developed to improve the silicon oxide (SiOx) hard coating adhered to a flexible plastic substrate through a consecutive plasma-enhanced chemical vapour deposition process, using the same organosilicon precursor. The adhesion of the hard coating structure, correlated with the buffer layer thickness, was rated by the standard tape-peeling test. An excellent adhesion (rank 5B) was available for the hard coating structure with an interfacial buffer layer deposited on polycarbo… Show more

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Cited by 23 publications
(16 citation statements)
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References 43 publications
(47 reference statements)
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“…[3,4] In coating deposition on PCs, two issues are particularly important: the deposition technology for protective coatings for large-scale application and the adhesion of coatings on the PC substrate because PC has bad surface wettability and poor interfacial adhesion. [5,6] Surface treatment or modification, such as oxidant etching, mechanical polishing, ultraviolet radiation, plasma activation, and primer layering, is a common approach to improve surface wetting and interfacial adhesion. [7][8][9][10][11] Among these techniques, plasma surface activation [12][13][14] and chromic acid etching [15][16][17] proved to be versatile in surface modification of polymer surface.…”
Section: Introductionmentioning
confidence: 99%
“…[3,4] In coating deposition on PCs, two issues are particularly important: the deposition technology for protective coatings for large-scale application and the adhesion of coatings on the PC substrate because PC has bad surface wettability and poor interfacial adhesion. [5,6] Surface treatment or modification, such as oxidant etching, mechanical polishing, ultraviolet radiation, plasma activation, and primer layering, is a common approach to improve surface wetting and interfacial adhesion. [7][8][9][10][11] Among these techniques, plasma surface activation [12][13][14] and chromic acid etching [15][16][17] proved to be versatile in surface modification of polymer surface.…”
Section: Introductionmentioning
confidence: 99%
“…The atomic ratio (O/Si) was gradually increased with the deposition temperature increasing and was saturated to about 1.98 as the substrate temperature reached 70 • C. Moreover, though the atomic concentration of the elemental nitrogen introduced into the films was limited in the range of 1.12 at.%-1.38 at.%, the atomic ratio of N/C for the samples deposited at a temperature of 70 • C was markedly increased from 0.77 to 1.84 as the SiO x N y film synthesized at 120 • C. This showed evidence of the deposition temperature being beneficial for the introduction of the nitrogen atoms and also for the decomposition of TMS precursor to cause a decrease in the carbon atoms in the synthesized films. Figure 4a-d highlights the narrow scan of Si 2p, O 1s, N 1s, and C 1s core levels for the SiO x N y films deposited at the substrate temperatures of 70 and 120 • C. In Figure 4a, the peak of the Si 2p core level for the SiO x N y films deposited at 70 • C was located at 103.8 eV, while that of the film deposited at 120 • C shifted to 103.5 eV, which corresponded well to the Si-O-Si chemical bond in the SiO x matrix [22,23]. The shift of the Si 2p peak toward a higher binding energy for the SiO x N y films deposited at 70 • C was attributed to the signal that emerged from the Si atoms, which was surrounded by the undissociated oxygen molecule (i.e., oxygen-rich condition) [24,25].…”
Section: Materials Preparation and Experimental Proceduresmentioning
confidence: 84%
“…Figure 4a-d highlights the narrow scan of Si 2p, O 1s, N 1s, and C 1s core levels for the SiOxNy films deposited at the substrate temperatures of 70 and 120 °C . In Figure 4a, the peak of the Si 2p core level for the SiOxNy films deposited at 70 °C was located at 103.8 eV, while that of the film deposited at 120 °C shifted to 103.5 eV, which corresponded well to the Si-O-Si chemical bond in the SiOx matrix [22,23]. The shift The XPS survey spectra for the SiO x N y films deposited at the substrate temperatures of 70 and 120 • C are displayed in Figure 3a.…”
Section: Materials Preparation and Experimental Proceduresmentioning
confidence: 90%
“…For the film synthesized from the TMS-O 2 gas mixture, the stretching and bending modes of the Si-O bonds could be determined at the peaks of 1066 and 817 cm −1 , respectively, while the signals related to the hydroxyl (O-H at around 2800-3700 cm −1 ) and silanol (Si-OH at 940 cm −1 ) were almost absent in the FTIR spectrum [27][28][29]. When the film was synthesized from the TMS-O 2 -NH 3 gas mixture at the gas flow ratios of 0.25 and 0.5, the Si-O bond was still the dominant signal over the FTIR spectra without the absorbance signal from the N-H bond at around 3200-3600 cm −1 [27,29].…”
Section: Resultsmentioning
confidence: 99%