Adaptive vibration control of micro-cantilever beam with piezoelectric actuator in MEMS

Abstract

This paper proposes a dynamical model and the governing equations of motion of the micro-cantilever beams based MEMS with piezoelectric actuator (PZT). The Rayleigh-Ritz method is used to reduce the order of the system and the state equations are presented in modal space. The first ten mode frequencies and mode shapes of the micro-cantilever beam with and without PZT are studied. The effects of PZT on the modal frequencies and shapes of the beam system can be ignored for the reason that the beam holds larger nature frequencies and Q values in micro-scale. A rational linearizing feedback controller with a high gain observer is designed to eliminate the unwanted deflection of the micro-cantilever beam system. The open-loop step response and the effects of situated places of PZT on the frequency responses of the system are discussed. Various frequency responses of the beam system, subject to different applied control voltages and feedback gains, are illustrated. The four resonances are well controlled, while the anti-resonance has little change. Computer simulations are provided to demonstrate the performance of the designed control scheme.

A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems

“…Several computer algorithms based on 3-D Finite Element Analysis (FEA) have been coupled to 3-D design tool to simulate MEMS, [28]. In order to alleviate the computational expense associated with the 3-D analyses, considerable efforts have been devoted to the development of reliable distributed reduced-order models (ROM) for MEMS, [21], [23].…”

Resonance vibration of an optical fiber micro-cantilever using electro-thermal actuation

“…Generally, operating under resonance frequency is a common technique for increasing the displacement amplitudes in vibration of MEMS devices [7]. Resonance vibrations can be induced using a wide range of actuation methods such as electrostatic [8][9][10][11], piezoelectric effect [12,13], and thermos-mechanical [14][15][16][17]. There are benefits, drawbacks, and limitations on using each of these actuation techniques in resonance vibration.…”

Robust Design of Thermally Actuated Micro-Cantilever Using Numerical Simulations

“…It has been used in conjunction with thermal actuation effectively for various applications in the past [4,9,10] and has obvious advantages in terms of simplicity in design and manufacturing. Micro-cantilevers can be excited to vibrate using several techniques such as using the bi-morph effect [5,11], base excitation [12], electrostatic [13,14] or electromagnetic [15] body forces. Using bimorph effect has been an advantageous method along with thermal actuation [2,5], while the advantages of base excitation as thermal actuator has not been explored to a sufficient extent.…”