Actuation Properties of Lead Zirconate Titanate Thick Films Structured on Si Membrane by the Aerosol Deposition Method

Abstract

The dynamics of populations of the vibrational states in a NO molecule (one-photon absorption) and of the electronic states in a 4,4 -bis(dimethylamino) stilbene molecule (two-photon absorption) is studied versus the frequency, intensity and shape of the laser pulse. We show that specially designed infrared laser pulses can build selective populations of certain vibrational states. A detuning of light frequency from the vibrational resonance qualitatively changes the dynamics of populations. It is found out that the populations of the nonresonant levels follow the pulse shape adiabatically if the detuning significantly exceeds the inverse characteristic time of the change of the pulse. Depopulation of the nonresonant vibrational states leads to a high population of the resonant state at the end of the pulse. Complete breakdown of the standard rotating wave approximation for a two-photon absorption process is observed even for a rather small intensity of the laser pulse. An analytical solution for the interaction of a pulse with a three-level system beyond the rotating wave approximation is obtained, and it is in close agreement with the strict numerical solution of the amplitude equations. Special attention is paid to the population dynamics of randomly oriented molecules. The orientational disorder as well as the vibrations limit the coherent population transfer. Calculations show the strong role of the anisotropy of photoexcitation in the coherent control of populations which can affect the anisotropy of photobleaching.

Ferroelectric and Piezoelectric Properties of Disk Shape Lead Zirconate Titanate Thick Films

“…14) On the other hand, the value of Ec is comparable to that of bulk PZT ceramics, and it is relatively low compared with that of the reported PZT thick films. 7,8) These results suggest that the ferroelectric and dielectric properties of the PZT thick film disks were consistent with those of the bulk PZT ceramics. Moreover, it can be seen that the PZT thick film disks showed the butterfly-shaped displacement curve, related with piezoelectric response.…”

“…1,2) However, the amount of the displacement and force of PZT films is not sufficient in some applications, so that various processes were investigated to fabricate thick PZT films, with thickness varied from 5 to 100 mm. [3][4][5][6][7][8] On the other hand, a low process temperature for the PZT thick films is required to ensure compatibility with the Si micro-machining process. In the case of thick films prepared by the powder source technique, such as screenprinting, 1,9) the usual firing temperature is more than 800 C. On the other hand, thin film preparation processes using chemical solutions, like sol-gel, have the advantage of a low firing temperature and dense microstructure despite the low film deposition rate.…”

Piezoceramic Coatings for MEMS and Structural Health Monitoring

“…Though the sol-gel-based chemical method is widely used for the fabrication of thick films, but the thickness of sol-gel-coated films are limited to a few microns (\5 lm) due to the requirement of a large number of deposition cycles. Different approaches have been proposed for the fabrication of a low sintering phase formation by the aerosol deposition method, [11,12] laser annealing processes [13], and microwave irradiation using magnetic field [14], etc. But, these fabrication methods require very involved and expensive instrumentation.…”

Preparation and characterization of lead zirconate titanate thick films prepared by chemical solution deposition for MEMS applications

“…PZT thick films meet the requirements of the device miniaturization and integration [1]. Among the reported deposition methods [5][6][7][8][9][10][11][12], chemical solution deposition (CSD) has been widely used to deposit PZT thick films. PZT thick films are usually grown on Pt/Ti/SiO 2 /Si substrate, which show excellent electrical properties.…”