Actively logical modulation of MEMS-based terahertz metamaterial

Abstract

The integration of micro-electro-mechanical system (MEMS) with metamaterial has provided a novel route to achieve programmability via its reconfigurable capabilities. Here, we propose and demonstrate a MEMS-based metadevice by using switchable winding-shaped cantilever metamaterial (WCM) for active logical modulation. WCM can be actuated by external driving voltage, and the logical modulation bit is performed by releasing MEMS cantilevers to represent “on” and “off” states. While the underneath substrate surface of a MEMS-based metadevice is rough after releasing the cantilevers, the metadevice is allowed to operate on the reconfigurable switching state and avoid the snapping down of the device when the system is overloaded. Such a reconfigurable and programmable MEMS-based metadevice exhibits multifunctional characteristics to simultaneously perform the logic operations of “OR” and “AND” gates. By exploiting the tuning mechanism of the MEMS-based metadevice, the arbitrary metamaterial configuration can be implanted into WCM. This opens a wide avenue to further enlarge the operating frequency range and applications in optoelectronic fields. These unique results provide various possibilities in multifunctional switching, active logical modulating, and optical computing applications.

Actively MEMS-Based Tunable Metamaterials for Advanced and Emerging Applications

“…Moreover, such voltage-controllable methods are reconfigurable. Figure 2e shows a winding-shaped cantilever metamaterial (WCM) array integrated with eSRR under a pre-deformed state [62]. The metamaterial layer is tailored to conduct the resistance heat-which can be induced-and the deformed height of ETA and then actively become tuned by applying a DC voltage.…”

“…Figure 2. ETA-based vertical tuning methods of metamaterials: (a) schematic of thermally tunable split-ring resonators (SRR) based on the pre-stressed metamaterial [58]; (b) optical microscopy image of the eSRR based on metamaterial microarray[59]; (c,d) schematic of MEMS-based tunable THz metamaterial and unit cell by using ETA vertical tuning platforms[60,61]; (e) scanning electron microscope (SEM) images of eSRR-WCM array and unit cell[62].…”

Reconfigurable terahertz metamaterials: From fundamental principles to advanced 6G applications

“…Recently, Xu et al. proposed a dual-torus toroidal metasurface for THz microfluidic sensing application, as shown in Figure 2 C ( Xu et al., 2021a ). The structure was fabricated by mechanically assembling the PTFE cap and bottom, containing the channel part with inlet and outlet solutions.…”

A voltage-controllable VO2 based metamaterial perfect absorber for CO2 gas sensing application

“…20 By directly adjusting the geometrical dimensions of the metamaterial unit cell, the MEMS-based metamaterial exhibits a large tuning range and good linearity in sensing applications. 21–24…”