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2022
DOI: 10.3390/electronics11020243
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Actively MEMS-Based Tunable Metamaterials for Advanced and Emerging Applications

Abstract: In recent years, tunable metamaterials have attracted intensive research interest due to their outstanding characteristics, which are dependent on the geometrical dimensions rather than the material composition of the nanostructure. Among tuning approaches, micro-electro-mechanical systems (MEMS) is a well-known technology that mechanically reconfigures the metamaterial unit cells. In this study, the development of MEMS-based metamaterial is reviewed and analyzed based on several types of actuators, including … Show more

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Cited by 47 publications
(19 citation statements)
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“…Recently, there was a large interest and progress in the field of actively MEMS-based tunable circuits and metamaterials [ 1 ]. A first comparison with the literature and current state-of-the-art can be conducted in terms of frequency range of operation.…”
Section: Discussionmentioning
confidence: 99%
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“…Recently, there was a large interest and progress in the field of actively MEMS-based tunable circuits and metamaterials [ 1 ]. A first comparison with the literature and current state-of-the-art can be conducted in terms of frequency range of operation.…”
Section: Discussionmentioning
confidence: 99%
“…A first comparison with the literature and current state-of-the-art can be conducted in terms of frequency range of operation. Significant advances have been obtained for tunable metamaterials that work at THz frequencies up to the infrared [ 1 ]. Our study focused instead on SRR metamaterials resonating in the MW range, and specifically from the S band to the K band.…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…In the visible region, materials such as Sapphire, Quartz, polydimethylsiloxane, and graphene can be used as indicated in [126]. The authors in [127] and [128] highlighted suspended nano disk, reconfigurable color filters based on suspended rectangular and elliptical lithium niobate (LiNbO3) on Si substrate, coated with a mirror layer; nanowire with ultra-low refractive index; tuning can also be performed by varying the helicity of the incident light.…”
Section: A Optical Ris Vs Rf Rismentioning
confidence: 99%
“…From such diversified spectrum of applications, it has been evident that MEMS are useful candidates in medical, chemical, and biological fields [9][10][11] . Recent developments in MEMS technology, in particular, have completely changed trends in a variety of industries, including sports, aerospace, biomedicine, electronics, home appliances, and automotive [12][13][14][15][16] . Microscale MEMS devices can run independently or in conjunction with other hardware.…”
Section: Introductionmentioning
confidence: 99%