Active vibration control and actuation of a small cantilever for applications in scanning probe instruments

Cunningham, Michael J.; Jenkins, David; Clegg, W.W.; Bakush, M.M.

doi:10.1016/0924-4247(96)80099-9

Cited by 39 publications

(14 citation statements)

References 13 publications

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“…Wang [6] considered many feedback control forms of vibration in a micro-machined cantilever beam with nonlinear electrostatic actuators. Cunningham et al [7,8] studied the application of vibration control to a fixed-free cantilever made of stainless steel with its length 16 mm, and the first two modes of vibration had been actively cancelled. Piezoelectric materials have coupled mechanical and electrical properties.…”

Section: Introductionmentioning

confidence: 99%

Adaptive vibration control of micro-cantilever beam with piezoelectric actuator in MEMS

Zhang

Meng

2005

Int J Adv Manuf Technol

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This paper proposes a dynamical model and the governing equations of motion of the micro-cantilever beams based MEMS with piezoelectric actuator (PZT). The Rayleigh-Ritz method is used to reduce the order of the system and the state equations are presented in modal space. The first ten mode frequencies and mode shapes of the micro-cantilever beam with and without PZT are studied. The effects of PZT on the modal frequencies and shapes of the beam system can be ignored for the reason that the beam holds larger nature frequencies and Q values in micro-scale. A rational linearizing feedback controller with a high gain observer is designed to eliminate the unwanted deflection of the micro-cantilever beam system. The open-loop step response and the effects of situated places of PZT on the frequency responses of the system are discussed. Various frequency responses of the beam system, subject to different applied control voltages and feedback gains, are illustrated. The four resonances are well controlled, while the anti-resonance has little change. Computer simulations are provided to demonstrate the performance of the designed control scheme.

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Section: Introductionmentioning

confidence: 99%

Adaptive vibration control of micro-cantilever beam with piezoelectric actuator in MEMS

Zhang

Meng

2005

Int J Adv Manuf Technol

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“…Wang [6] considered many feedback control forms of vibration in a micromachined cantilever beam with nonlinear electrostatic actuators. Cunningham et al [7] studied the application of vibration control to a fixed-free cantilever made of stainless steel with its length 16 mm, and the first two modes of 978-1-61284-985-0/11/$26.00 ©2011 IEEE 336 vibration had been actively canceled. Piezoelectric materials have coupled mechanical and electrical properties.…”

Section: Introductionmentioning

confidence: 99%

Intelligent vibration control of micro-cantilever beam in MEMS

Sarrafan

Zareh

Zabihollah

et al. 2011

2011 IEEE International Conference on Mechatronics

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Considerable attention has been devoted recently to vibration control using intelligent materials as sensor/actuator. An intelligent control technique using a neural network is proposed for vibration control of micro-cantilever beam with bonded piezoelectric sensor and actuator. Structure modal characteristic analysis is done to determine the optimal configuration of piezoelectric sensor and actuator. With the piezoelectric elements are surface-bonded near the same position to the flxed end of micro-cantilever beam, an optimal controller, linear quadratic Gaussian (LQG), and an intelligent strategy based on neural network are investigated. Finally, the simulation results are given to demonstrate the effectiveness of the control method in this paper, neural network scheme has strong robustness to Gaussian disturbance compared with the LQG control method, Moreover, it is shown that vibration of micro-cantilever beam in MEMS can be significantly suppressed by the proposed neural network strategy.

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“…Regarding the development and application of the active vibration control of flexible beams, Cunningham et al [1] investigated active vibration control and actuation of the small cantilevers found in atomic force microscopes and magnetic force microscopes. Piezoelectric elements and optical vibration sensors were used in the study to perform active vibration control by isolating unnecessary vibration to improve the measurement accuracy.…”

Section: Introductionmentioning

confidence: 99%