Active Release of Microobjects Using a MEMS Microgripper to Overcome Adhesion Forces

Chen, B.K.; Zhang, Yong; Sun, Yu

doi:10.1109/jmems.2009.2020393

Cited by 115 publications

(49 citation statements)

References 46 publications

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“…B. K. Chen et al utilized a plunging mechanism to generate sufficient momentum. They detached 7.5 -10.9 μm borosilicate glass spheres with an accuracy of 0.7 ± 0.46 μm [15]. Watanabe et al proposed a squeezing effect for preci-sion micromanipulation by vibrating a finger and squeezing a film [16].…”

Section: Et Al Attached a 20mentioning

confidence: 99%

High-Speed Active Release End-Effector Motions for Precise Positioning of Adhered Micro-Objects

Kim¹,

Kojima²,

Kamiyama³

et al. 2018

WJET

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This paper presents a release method for micro-objects. To improve position accuracy after release, we propose 3D high-speed end-effector motions. The classical release task focuses on the detachment of a micro-object from an end-effector. The technique utilizes merely the vibration of the end-effector regardless of the pattern of movement. To release different sizes of microobjects and place them precisely at the desired locations in both air and liquid media, in this paper, we propose high-speed motions by analyzing the adhesion force and movement of micro-objects after separation. To generate high end-effector acceleration, many researchers have applied simple vibration by using an additional actuator. However, in our research, 3D high-speed motion with apt amplitude is accomplished by using only a compact parallel mechanism. To verify the advantages of the proposed motion, we compare five motions, 1D motions (in X-, Y-, and Z-directions) and circular motions (clockwise and counterclockwise directions), by changing the frequency and amplitude of the end-effector. Experiments are conducted with different sizes of microbeads and NIH3T3 cells. From these experiments, we conclude that a counterclockwise circular motion can release the objects precisely in air, while 1D motion in the Y direction and two circular motions can detach the objects at the desired positions after release in a liquid environment.

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Section: Et Al Attached a 20mentioning

confidence: 99%

High-Speed Active Release End-Effector Motions for Precise Positioning of Adhered Micro-Objects

Kim¹,

Kojima²,

Kamiyama³

et al. 2018

WJET

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show abstract

“…MEMS grippers are typically driven by electrostatic, electrothermal, and piezoelectric actuators 47,77 . They are made with feature structures using different fabrication methods [101][102][103][104][105] , and have been applied for various nanomanipulation tasks [106][107][108][109][110][111][112] , as summarized in Table 2. Although electrostatic actuation has low power, it requires relatively high actuation voltages.…”

Section: Sensingmentioning

confidence: 99%

Recent advances in nanorobotic manipulation inside scanning electron microscopes

et al. 2016

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A scanning electron microscope (SEM) provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems inside a vacuum chamber to realize simultaneous imaging and direct interactions with nanoscaled samples. Emerging techniques for nanorobotic manipulation during SEM imaging enable the characterization of nanomaterials and nanostructures and the prototyping/assembly of nanodevices. This paper presents a comprehensive survey of recent advances in nanorobotic manipulation, including the development of nanomanipulation platforms, tools, changeable toolboxes, sensing units, control strategies, electron beam-induced deposition approaches, automation techniques, and nanomanipulation-enabled applications and discoveries. The limitations of the existing technologies and prospects for new technologies are also discussed.

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“…and Koichi OZAKI *1 *1,*2 Utsunomiya University 7-1-2 Yoto, Utsunomiya-shi, Tochigi 321-8585, Japan (Fuchiwaki et al, 2008(Fuchiwaki et al, )( 2015 ( 2013) MEMS (Chen et al, 2009) (Dionnet et al, 2004) (Gauthier, 1998) (Saito et al, 2002) (Gauthier et al, 1998) 2 (Lambert et al, 2003) Dafflon Γ (Gauthier et al, 1998) (Abe et al, 2016) θ…”

Section: Memsmentioning

confidence: 99%

Strategy of pickup and release of micro-object by approach angle in geometrical and mechanical conditions

Abe¹,

Ogasawara²,

Ozaki³

2017

Transactions of the JSME (In Japanese)

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This paper discusses a micro manipulation considering that an approach angle on pickup affects adhesion and mechanical balance on release by using two needle-shaped end-effectors. In micro-scale, adhesion is generated by capillary, van der Waals and electrostatic besides gravity. Accurate and repeatable pick-and-release/place of micro sized objects is a longstanding challenge due to the strong adhesion in micro manipulation. We first introduce a strategy of pickup and release of a micro sphere. The strategy features in that the approach angle on pickup decides release by two conditions: one is geometrical condition between the sphere and a tip of end-effector, and the another is mechanical condition by forces (adhesion, gravity and friction) to the sphere from the tip and a substrate. To confirm the efficacy of the strategy, the micromanipulation tests with different approach angles have been conducted. Finally, we show the experimental results by pickup and release of spherical glass beads and not spherical pollens, for confirming the validity of the proposed strategy as a novel manipulation method.

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Active Release of Microobjects Using a MEMS Microgripper to Overcome Adhesion Forces

Cited by 115 publications

References 46 publications

High-Speed Active Release End-Effector Motions for Precise Positioning of Adhered Micro-Objects

High-Speed Active Release End-Effector Motions for Precise Positioning of Adhered Micro-Objects

Recent advances in nanorobotic manipulation inside scanning electron microscopes

Strategy of pickup and release of micro-object by approach angle in geometrical and mechanical conditions

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