Active hard mount vibration isolation for precision equipment

Tjepkema, D.

doi:10.3990/1.9789036534185

Cited by 13 publications

(28 citation statements)

References 36 publications

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“…From the obtained residues the mode shapes can be estimated. A similar modal estimation method is implemented in [19], where characteristic loci are used to assess the stability of poles instead of the FRF estimates. However this is only possible for square multi-input multi-output (MIMO) systems, which is not the case in this paper.…”

Section: Modal Estimation Methodsmentioning

confidence: 99%

Modal Measurements and Model Corrections of A Large Stroke Compliant Mechanism

Wijma¹,

Boer²,

Aarts³

et al. 2014

Archive of Mechanical Engineering

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In modelling flexure based mechanisms, generally flexures are modelled perfectly aligned and nominal values are assumed for the dimensions. To test the validity of these assumptions for a two Degrees Of Freedom (DOF) large stroke compliant mechanism, eigenfrequency and mode shape measurements are compared to results obtained with a flexible multibody model. The mechanism consists of eleven cross flexures and seven interconnecting bodies. From the measurements 30% lower eigenfrequencies are observed than those obtained with the model. With a simplified model, it is demonstrated that these differences can be attributed to wrongly assumed leaf spring thickness and misalignment of the leaf springs in the cross flexures. These manufacturing tolerances thus significantly affect the behaviour of the two DOF mechanism, even though it was designed using the exact constraint design principle. This design principle avoids overconstraints to limit internal stresses due to manufacturing tolerances, yet this paper shows clearly that manufacturing imperfections can still result in significantly different dynamic behaviour.

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Section: Modal Estimation Methodsmentioning

confidence: 99%

Modal Measurements and Model Corrections of A Large Stroke Compliant Mechanism

Wijma¹,

Boer²,

Aarts³

et al. 2014

Archive of Mechanical Engineering

View full text Add to dashboard Cite

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“…The inverse is possible because the use of 6 sensors and 6 Cartesian coordinates. More details of the experimental setup are given by Tjepkema [64]. (Fig.…”

Section: Methodsmentioning

confidence: 99%

“…The vibrations of the floor and platform can be measured using accelerometers, for each direction. More details about the experimental setup can be found in Tjepkema [64]. Using a rigid-body model, the relation between the sensor coordinates q q q and the accelerations in Cartesian coordinates x x x = (x, y, z, θ x , θ y , θ z ), based on the Cartesian coordinate system, is derived as…”

Section: Vibration Isolator Setupmentioning

confidence: 99%

“…An alternative approach is to apply active vibration isolation control to a flexibly suspended single-tube configuration. This is an application of active hard mount isolation for precision equipment [64,76]. Active vibration isolation control is used, in Chapter 3 -5, to achieve attenuation in a limited frequency band, while maintaining the positive effects of the passive support stiffness.…”

Section: Investigate the Effect Of External Vibrations On The Performmentioning

confidence: 99%

“…An alternative approach is to apply active vibration isolation control to a flexible-suspended single-tube configuration. This is an application of active hard mount isolation for precision equipment [64].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Vibration isolation for coriolis mass-flow meters

Ridder¹

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Frequency domain stability and relaxed convergence conditions for filtered error adaptive feedforward

Spanjer,

Köroğlu,

Hakvoort

2024

Adaptive Control & Signal

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SummaryThe convergence of filtered error and filtered reference adaptive feedforward is limited by three effects: model mismatch, unintended input‐disturbance interaction and too fast parameter adaptation. In this article, the first two effects are considered for MIMO systems under the slow parameter adaptation assumption. The convergence with model mismatch is conventionally guaranteed using a strictly positive‐real condition. This condition can be easily verified in the frequency domain, but due the high‐frequency parasitic dynamics of real systems, it is hardly ever satisfied. Nevertheless, filtered error and filtered reference adaptive feedforward have successfully been implemented in numerous applications without satisfying the strictly positive‐real condition. It is shown in this article that the strictly positive‐real condition can be relaxed to a power‐weighted integral condition, that is less conservative and provides a practical check for the convergence of filtered error adaptive feedforward for real systems in the frequency domain. The effects of input‐disturbance interaction are analysed and conditions for the stability are given in the frequency domain. Both conditions give clear indicators for frequency domain filter tuning, and are verified on an experimental active vibration isolation system.

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Active hard mount vibration isolation for precision equipment

Cited by 13 publications

References 36 publications

Modal Measurements and Model Corrections of A Large Stroke Compliant Mechanism

Modal Measurements and Model Corrections of A Large Stroke Compliant Mechanism

Vibration isolation for coriolis mass-flow meters

Frequency domain stability and relaxed convergence conditions for filtered error adaptive feedforward

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