Acousto-optic Scanning Spatial-switching Multiphoton Lithography

Abstract

Despite of tremendous potential of multiphoton lithography (MPL) in laboratorial and industrial applications, simultaneous achievement of high throughput, high accuracy, high design freedom, and a broad range of material structuring capabilities remains a long-pending challenge. To address the issue, we propose an acousto-optic scanning with spatial-switching multispots (AOSS) method. Inertia-free acousto-optic scanning and nonlinear swept techniques have been developed for achieving ultrahigh-speed and aberration-free scanning. Moreover, a spatial optical switch concept has been implemented to significantly boost the lithography throughput while maintaining high resolution and high design freedom. An eight-foci AOSS system has demonstrated a record-high 3D printing rate of 7.6×10^7 voxel/s, which is nearly one order of magnitude higher than earlier scanning MPL, exhibiting its promise for future scalable 3D nanomanufacturing.

High-Throughput Two-Photon 3D Printing Enabled by Holographic Multi-Foci High-Speed Scanning

“…A novel acousto-optic scanning strategy that scans 8 foci with a speed of 2.091 m s −1 is recently proposed. 23 Our strategy can surpass this work in printing rate with the increased foci number. In addition, our platform offers adjustable foci arrangement and superior scanning range compared to acousto-optic-based systems, which alleviates the burden of frequent stage motion and in turn enhances the overall processing efficiency.…”

“…The first practice introduces high-speed scanning devices into the system. The high operation frequency of galvanometric mirrors enables remarkable production efficiency of single-point printing. − Acousto-optic deflectors (AODs), as noninertial devices, allow for even higher scanning speeds and have proven valuable in high-throughput TPP printing . The second practice involves dividing the incident Gaussian beam into multiple beams for parallel processing.…”

“…M1, M2, M3, M4, M5, M6, M7, M8, M9, and M10 are mechanical scanning method. A1 is acousto-optic scanning method. The specific data of the methods are listed in Table S1.…”

“…Given these compelling advantages, the voxel printing rate of our method exceeds the highest record of holographic and mechanical scanning methods by dozens of times while maintaining the sub-500 nm printing capability. A novel acousto-optic scanning strategy that scans 8 foci with a speed of 2.091 m s –1 is recently proposed . Our strategy can surpass this work in printing rate with the increased foci number.…”

“…20−22 Acoustooptic deflectors (AODs), as noninertial devices, allow for even higher scanning speeds and have proven valuable in highthroughput TPP printing. 23 The second practice involves dividing the incident Gaussian beam into multiple beams for parallel processing. Static beam splitters, including MLA (microlens array) 24,25 and DOE (diffractive optical element), 26,27 can only generate a fixed array of focal points.…”